A CAD model for an air-gap-type TFBAR is presented. Aluminum nitride is used as the piezoelectric material with platinum electrodes. To verify the model, simulated and measured results are compared for various top electrode thicknesses, and the agreement is within 0.5% for the parallel resonance frequency.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Electrical and Electronic Engineering