CAD model analysis of the air-gap type TFBAR

Kun Wook Kim, Jong Gwan Yook, Han Kyu Park

Research output: Contribution to journalArticle

Abstract

A CAD model for an air-gap-type TFBAR is presented. Aluminum nitride is used as the piezoelectric material with platinum electrodes. To verify the model, simulated and measured results are compared for various top electrode thicknesses, and the agreement is within 0.5% for the parallel resonance frequency.

Original languageEnglish
Pages (from-to)384-385
Number of pages2
JournalMicrowave and Optical Technology Letters
Volume34
Issue number5
DOIs
Publication statusPublished - 2002 Sep 5

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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