Carbon nanotube-incorporated direct-patternable SnO2 thin films formed by photochemical metal-organic deposition

Hyuncheol Kim, Hyeong Ho Park, Ho Jung Chang, Hyeongtag Jeon, Hyung-Ho Park

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

The electrical property of SnO2 thin film was improved by the incorporation of multi-wall carbon nanotubes (MWNTs). MWNTs were incorporated into SnO2 photosensitive precursor solution and the direct-patternable film was prepared by photochemical metal-organic deposition. The incorporation of MWNTs into SnO2 films slightly reduced the transmittance of SnO2 films due to light scattering by the incorporated MWNTs. In addition, with incorporation of MWNTs, the crystallinity of the SnO2 hybrid films decreased slightly and the film sheet resistance improved due to enhancement of charge mobility because of the π-bonding nature of MWNTs. Direct-patterning of SnO2 hybrid films containing MWNTs was performed without photoresist or dry etching. These results suggest that a micro-patterned system can be simply fabricated at a low cost and the electrical properties of SnO2 films can be improved by incorporating MWNTs.

Original languageEnglish
Pages (from-to)1072-1076
Number of pages5
JournalThin Solid Films
Volume517
Issue number3
DOIs
Publication statusPublished - 2008 Dec 1

Fingerprint

Carbon Nanotubes
Carbon nanotubes
Metals
carbon nanotubes
Thin films
thin films
metals
Electric properties
electrical properties
Dry etching
Sheet resistance
Photoresists
photoresists
Light scattering
crystallinity
transmittance
light scattering
etching
augmentation

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

Kim, Hyuncheol ; Park, Hyeong Ho ; Chang, Ho Jung ; Jeon, Hyeongtag ; Park, Hyung-Ho. / Carbon nanotube-incorporated direct-patternable SnO2 thin films formed by photochemical metal-organic deposition. In: Thin Solid Films. 2008 ; Vol. 517, No. 3. pp. 1072-1076.
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Carbon nanotube-incorporated direct-patternable SnO2 thin films formed by photochemical metal-organic deposition. / Kim, Hyuncheol; Park, Hyeong Ho; Chang, Ho Jung; Jeon, Hyeongtag; Park, Hyung-Ho.

In: Thin Solid Films, Vol. 517, No. 3, 01.12.2008, p. 1072-1076.

Research output: Contribution to journalArticle

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