Carbon nanotubes-integrated inertial switch for reliable detection of threshold acceleration

J. I. Lee, Y. Song, H. K. Jung, J. Choi, Y. Eun, J. Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

The vertically aligned carbon nanotube (CNT)-bundle is utilized as a mechanical buffer for inertial micro-switch to extend the contact time and therefore to obtain reliable and stable output signals. The CNT bundles are directly synthesized on two facing surfaces of both movable- and stationary electrodes by patterning the catalyst on released microstructures and the following thermal chemical vapor deposition process. When the movable electrode collides with the stationary electrode, CNT bundles are elastically deformed, significantly prolonging the contact time. The measured contact time of CNT integrated inertial micro-switch was 108 s, while the inertial micro-switch without CNT was 4.5 s.

Original languageEnglish
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages711-714
Number of pages4
DOIs
Publication statusPublished - 2011
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: 2011 Jun 52011 Jun 9

Publication series

Name2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
CountryChina
CityBeijing
Period11/6/511/6/9

All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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  • Cite this

    Lee, J. I., Song, Y., Jung, H. K., Choi, J., Eun, Y., & Kim, J. (2011). Carbon nanotubes-integrated inertial switch for reliable detection of threshold acceleration. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 711-714). [5969201] (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969201