Carbon nanotubes network contact lubrication for highly reliable MEMS switch

Min Ho Seo, Eunhwan Jo, Seung Deok Ko, Jungwook Choi, Yong Hoon Yoon, Dae Sung Kwon, Jongbaeg Kim, Jun Bo Yoon

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

This paper firstly reports a highly reliable MEMS-switch employing a CNTs-network lubricant in the contact-area. By covering the contact-area with the CNTs-network, we achieved more than an order of magnitude extension in the lifetime of the MEMS-switch. We determined that this drastic improvement in the reliability arises from the compressibility of the CNTs-network, generating remarkable contact-area widening with suppressed adhesive interaction at the contact interface. We also observed that the highly flexible CNTs-network does not deteriorate high-speed operation of the device. The proposed switch exhibited a lifetime more than 10 times longer under hot-switching condition than a device without CNTs.

Original languageEnglish
Title of host publication2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages5-8
Number of pages4
ISBN (Electronic)9781509050789
DOIs
Publication statusPublished - 2017 Feb 23
Event30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States
Duration: 2017 Jan 222017 Jan 26

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
CountryUnited States
CityLas Vegas
Period17/1/2217/1/26

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Seo, M. H., Jo, E., Ko, S. D., Choi, J., Yoon, Y. H., Kwon, D. S., Kim, J., & Yoon, J. B. (2017). Carbon nanotubes network contact lubrication for highly reliable MEMS switch. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017 (pp. 5-8). [7863325] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2017.7863325