This paper firstly reports a highly reliable MEMS-switch employing a CNTs-network lubricant in the contact-area. By covering the contact-area with the CNTs-network, we achieved more than an order of magnitude extension in the lifetime of the MEMS-switch. We determined that this drastic improvement in the reliability arises from the compressibility of the CNTs-network, generating remarkable contact-area widening with suppressed adhesive interaction at the contact interface. We also observed that the highly flexible CNTs-network does not deteriorate high-speed operation of the device. The proposed switch exhibited a lifetime more than 10 times longer under hot-switching condition than a device without CNTs.
|Title of host publication||2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017|
|Publisher||Institute of Electrical and Electronics Engineers Inc.|
|Number of pages||4|
|Publication status||Published - 2017 Feb 23|
|Event||30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States|
Duration: 2017 Jan 22 → 2017 Jan 26
|Name||Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)|
|Other||30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017|
|Period||17/1/22 → 17/1/26|
Bibliographical noteFunding Information:
This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korea government (MSIP) & by MSIP as GFP/NRF-2015R1A2A1A01005496 & CISS-2012054187.
© 2017 IEEE.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering