Characteristics of DLC films by DC magnetron sputtering incorporated with cesium

Dong Joon Choi, Won Hoe Koo, Soon Moon Jeong, Dong Won Han, Duck Yeon Lee, Hong Koo Baik, Serk Won Jang, Sung Man Lee

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Diamond-like carbon films were deposited by planar DC magnetron sputtering with cesium vapor. The electrical properties of the plasma were investigated by the I-V measurement of the discharge. The increase in the plasma density and the generation of the negative carbon ions were observed from the I-V curves and deposition rate with different substrate biases. The deposited DLC films were examined by Raman spectroscopy and plasmon energy loss analysis in order to assess their structures. The DLC film obtained with Cs vapor contained a higher sp3 fraction than that without Cs vapor. This result implied that the negative carbon ions produced by Cs vapor participated in the deposition through the subplantation process. From experimental results, it is expected that Cs vapor addition to conventional magnetron sputtering system makes possible the deposition of higher quality DLC as well as large area deposition.

Original languageEnglish
Pages (from-to)445-451
Number of pages7
JournalVacuum
Volume72
Issue number4
DOIs
Publication statusPublished - 2004 Jan 16

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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    Choi, D. J., Koo, W. H., Jeong, S. M., Han, D. W., Lee, D. Y., Baik, H. K., Jang, S. W., & Lee, S. M. (2004). Characteristics of DLC films by DC magnetron sputtering incorporated with cesium. Vacuum, 72(4), 445-451. https://doi.org/10.1016/j.vacuum.2003.10.004