Characteristics of indium zinc oxide films deposited using the facing targets sputtering method for OLEDs applications

Y. S. Rim, H. J. Kim, K. H. Kim

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

The amorphous indium zinc oxide (IZO) thin films were deposited on polyethersulfone (PES) and glass substrates using the facing targets sputtering (FTS) system. The electrical, optical and structural properties of the IZO thin films deposited as functions of sputtering parameters on the glass and PES substrates. An optimal IZO deposition condition is fabricated for organic light-emitting device (OLED) based on glass and PES. The amorphous IZO anode-based OLEDs show superior current density and luminance characteristics.

Original languageEnglish
Pages (from-to)6223-6227
Number of pages5
JournalThin Solid Films
Volume518
Issue number22
DOIs
Publication statusPublished - 2010 Sep 1

Fingerprint

Zinc Oxide
Indium
Organic light emitting diodes (OLED)
Zinc oxide
zinc oxides
indium oxides
Oxide films
Sputtering
oxide films
sputtering
Glass
glass
Thin films
Substrates
thin films
luminance
Structural properties
Luminance
Anodes
Electric properties

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

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Characteristics of indium zinc oxide films deposited using the facing targets sputtering method for OLEDs applications. / Rim, Y. S.; Kim, H. J.; Kim, K. H.

In: Thin Solid Films, Vol. 518, No. 22, 01.09.2010, p. 6223-6227.

Research output: Contribution to journalArticle

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AB - The amorphous indium zinc oxide (IZO) thin films were deposited on polyethersulfone (PES) and glass substrates using the facing targets sputtering (FTS) system. The electrical, optical and structural properties of the IZO thin films deposited as functions of sputtering parameters on the glass and PES substrates. An optimal IZO deposition condition is fabricated for organic light-emitting device (OLED) based on glass and PES. The amorphous IZO anode-based OLEDs show superior current density and luminance characteristics.

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