Abstract
The amorphous indium zinc oxide (IZO) thin films were deposited on polyethersulfone (PES) and glass substrates using the facing targets sputtering (FTS) system. The electrical, optical and structural properties of the IZO thin films deposited as functions of sputtering parameters on the glass and PES substrates. An optimal IZO deposition condition is fabricated for organic light-emitting device (OLED) based on glass and PES. The amorphous IZO anode-based OLEDs show superior current density and luminance characteristics.
| Original language | English |
|---|---|
| Pages (from-to) | 6223-6227 |
| Number of pages | 5 |
| Journal | Thin Solid Films |
| Volume | 518 |
| Issue number | 22 |
| DOIs | |
| Publication status | Published - 2010 Sep 1 |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry
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Characteristics of indium zinc oxide films deposited using the facing targets sputtering method for OLEDs applications. / Rim, Y. S.; Kim, H. J.; Kim, K. H.
In: Thin Solid Films, Vol. 518, No. 22, 01.09.2010, p. 6223-6227.Research output: Contribution to journal › Article
TY - JOUR
T1 - Characteristics of indium zinc oxide films deposited using the facing targets sputtering method for OLEDs applications
AU - Rim, Y. S.
AU - Kim, H. J.
AU - Kim, K. H.
PY - 2010/9/1
Y1 - 2010/9/1
N2 - The amorphous indium zinc oxide (IZO) thin films were deposited on polyethersulfone (PES) and glass substrates using the facing targets sputtering (FTS) system. The electrical, optical and structural properties of the IZO thin films deposited as functions of sputtering parameters on the glass and PES substrates. An optimal IZO deposition condition is fabricated for organic light-emitting device (OLED) based on glass and PES. The amorphous IZO anode-based OLEDs show superior current density and luminance characteristics.
AB - The amorphous indium zinc oxide (IZO) thin films were deposited on polyethersulfone (PES) and glass substrates using the facing targets sputtering (FTS) system. The electrical, optical and structural properties of the IZO thin films deposited as functions of sputtering parameters on the glass and PES substrates. An optimal IZO deposition condition is fabricated for organic light-emitting device (OLED) based on glass and PES. The amorphous IZO anode-based OLEDs show superior current density and luminance characteristics.
UR - http://www.scopus.com/inward/record.url?scp=77956056391&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=77956056391&partnerID=8YFLogxK
U2 - 10.1016/j.tsf.2010.03.169
DO - 10.1016/j.tsf.2010.03.169
M3 - Article
AN - SCOPUS:77956056391
VL - 518
SP - 6223
EP - 6227
JO - Thin Solid Films
JF - Thin Solid Films
SN - 0040-6090
IS - 22
ER -