The defects in the gate oxide were directly characterized by MEIS and HRXPS measurements. Furthermore, it was observed that there is a clear difference between STM images of dry and wet oxidized samples in the defect generation rate and TDDB. These results strongly suggest that the wet oxide using H2O formed by catalysis of Pt has a smoother interfacial roughness and fewer defects than the dry oxide.
|Number of pages||5|
|Journal||Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films|
|Publication status||Published - 2003 Jul|
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films