Characterization and process effects of HfO2 thin films grown by metal-organic molecular beam epitaxy

Myoung Seok Kim, Young Don Ko, Minseong Yun, Jang Hyuk Hong, Min Chang Jeong, Jae Min Myoung, Ilgu Yun

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Abstract

HfO2 dielectric layers were grown on the p-type Si(1 0 0) substrate by metal-organic molecular beam epitaxy (MOMBE). Hafnium-tetra-butoxide [Hf(O·t-C4H9)4] was used as a Hf precursor and argon gas was used as a carrier gas. The microstructure and thickness of HfO2 films were measured by scanning electron microscopy (SEM) and high-resolution transmission electron microscopy (HRTEM). The electrical characteristics of the HfO2 layers were evaluated by high frequency (HF) capacitance-voltage (C-V) and current-voltage (I-V) measurements. The surface morphology, crystal structure, and chemical binding states of HfO2 films were also examined by atomic force microscopy (AFM), X-ray diffraction (XRD), and X-ray photoelectron spectroscopy (XPS) measurements. HF C-V and I-V measurements have shown that HfO2 layer grown by MOMBE has higher dielectric constant (k) of 20-22 and lower leakage current density of ∼10-8 A/cm2 compared with the conventional SiO2. In addition, it has been shown that the HfO2 layer has fixed oxide charge of about 8 × 1011 cm-2 and interfacial state density of about 1 × 10 12 eV-1 cm-2. The electrical characteristics and surface morphology of HfO2 films are affected by O 2/Ar gas flow ratio. Finally, post-metallization annealing (PMA) was carried out to reduce the interface state density.

Original languageEnglish
Pages (from-to)20-30
Number of pages11
JournalMaterials Science and Engineering B: Solid-State Materials for Advanced Technology
Volume123
Issue number1
DOIs
Publication statusPublished - 2005 Nov 15

Bibliographical note

Funding Information:
This research was supported by the MIC (Ministry of Information and Communication), Korea, under the ITRC (Information Technology Research Center) support program supervised by the IITA (Institute of Information Technology Assessment).

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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