Characterization and process effects of HfO2 thin films grown by metal-organic molecular beam epitaxy

Myoung Seok Kim, Young Don Ko, Minseong Yun, Jang Hyuk Hong, Min Chang Jeong, Jae Min Myoung, Ilgu Yun

Research output: Contribution to journalArticle

44 Citations (Scopus)

Fingerprint Dive into the research topics of 'Characterization and process effects of HfO<sub>2</sub> thin films grown by metal-organic molecular beam epitaxy'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy