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Characterization of laser induced charging damage in laser micromachining
Jong Souk Yeo
School of Integrated Technology
Research output
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Contribution to journal
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Article
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peer-review
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Citation (Scopus)
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Dive into the research topics of 'Characterization of laser induced charging damage in laser micromachining'. Together they form a unique fingerprint.
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Earth and Planetary Sciences
Laser
33%
Show
25%
Laser Machining
25%
Damage
25%
Characterization
16%
Ablation
16%
Machining
16%
Charge Distribution
8%
Region
8%
Support
8%
Increasing
8%
Datum
8%
Bias
8%
Position (Location)
8%
Order
8%
Magnitude
8%
Amount
8%
Distance
8%
Accumulation
8%
Statics
8%
Value
8%
Hydrofluorocarbon
8%
Average
8%
Physics
Probe
100%
Laser
33%
Laser Machining
25%
Machining
16%
Ablation
16%
Wafer
8%
Charge Distribution
8%
Region
8%
Distance
8%
Increasing
8%
Value
8%
Magnitude
8%
Accumulations
8%
Position (Location)
8%
Engineering
Laser Micromachining
25%
Machining
16%
Ablation
16%
Insulating Layer
16%
Measurement
8%
Layer Coating
8%
Induced Damage
8%
Device Structure
8%
Negative Charge
8%
Repetition Rate
8%
Supports
8%
Surfaces
8%
Generates
8%
Characteristics
8%
Small Amount
8%
Mechanisms
8%
Chemistry
Ablation
16%
Machining
16%
Surface
8%
Potential
8%
Cumulative
8%
Amount
8%
Charge Distribution
8%
Material Science
Characterization
16%
Surface
8%