Characterization of mesoporous silica thin films for application to thermal isolation layer

Junmyung Lee, Jihun Kim, Byung Jun Lee, Jongchan Lee, Hyun Woo Lee, Min Hee Hong, Hyung Ho Park, Dong Il Shim, Hyung Hee Cho, Kwang Ho Kwon

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

Mesoporous silica thin films were easily prepared by a sol–gel process and spin-coating, and the film properties were investigated for potential application to thermal isolation layers. Scanning electron microscopy and X-ray diffraction were used to determine the film thicknesses and to analyze the mesoporous film structures, respectively. The refractive indexes and porosities of the films were determined by spectroscopic ellipsometry and the Lorentz–Lorenz equation, respectively. The infrared absorptions and thermal conductivities of the films were measured by Fourier transform infrared spectroscopy and a 3-ω method, respectively. The porosity and the number of pores of the films increased with increasing Brij-76 surfactant concentration, the interpore distance and thermal conductivity decreased. The experimental results showed that the mesoporous silica thin films could be function as excellent thermal isolation layers.

Original languageEnglish
Pages (from-to)715-719
Number of pages5
JournalThin Solid Films
Volume660
DOIs
Publication statusPublished - 2018 Aug 30

Bibliographical note

Funding Information:
This study was supported by the Industrial Technology Innovation Program ( 10054882 , Development of dry cleaning technology for nanoscale patterns) funded by the Ministry of Trade, Industry and Energy (MOTIE, Republic of Korea).

Publisher Copyright:
© 2018 Elsevier B.V.

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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