Chemical and electrical properties of ZnS deposited with DEZ and H 2S by atomic layer deposition method

Seoungwoo Kuk, Seokhwan Bang, Inhoe Kim, Sunyeol Jeon, Hyeongtag Jeon, Hyung Ho Park, Ho Jung Chang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

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Engineering & Materials Science

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Chemical Compounds