Chemical and electrical properties of ZnS deposited with DEZ and H 2S by atomic layer deposition method

Seoungwoo Kuk, Seokhwan Bang, Inhoe Kim, Sunyeol Jeon, Hyeongtag Jeon, Hyung Ho Park, Ho Jung Chang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Chemical and electrical properties of ZnS deposited with DEZ and H 2S by atomic layer deposition method'. Together they form a unique fingerprint.

Chemistry

Physics

Chemical Engineering

Material Science