Chemical Bonding Characteristics of Ge 2Sb 2Te 5 for Thin Films

Min Jung Shin, Doo Jin Choi, Myung Jin Kang, Se Young Choi, In Woo Jang, Kye Nam Lee, Young Jin Park

Research output: Contribution to journalArticlepeer-review

37 Citations (Scopus)

Abstract

The chalcogenide-based phase change memory has been suggested as an alternative non-volatile memory device at the 180 nm technology node. These materials appear to have a reversable phase change between amorphous and crystalline phasees. A sputtered Ge 2Sb 2Te 5 film is deposited on a (100) Si substrate. In order to investigate the crystallization tendency at a certain temperature, we use X-ray diffraction and X-ray photoelectron spectroscopy. The film morphology is observed by using atomic forces microscopy. Grain growth and a phase transition from cubic to hexagonal occurs when the films are heated from 170°C and 380°C, and Ge-Te and Te-Sb bonds increased with annealing.

Original languageEnglish
Pages (from-to)10-13
Number of pages4
JournalJournal of the Korean Physical Society
Volume44
Issue number1
Publication statusPublished - 2004 Jan

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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