This letter presents circuit modeling of micromachined transitions for interconnecting Coplanar Waveguides (CPW) on silicon to microstrip lines suspended on low-loss membranes. The transition plays a critical role in developing MEMS tunable high-Q filters for Ka-and U-band applications. Exact circuit modeling of the transitions provides methods to design such structures without full-wave simulations. Comparisons between the circuit model results and full-wave simulation results, as well as the experimental results are presented.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Electrical and Electronic Engineering