Circuit modeling of micromachined transitions for MEMS tunable filters

Yongshik Lee, Alexandras Margomenos

Research output: Contribution to journalArticlepeer-review


This letter presents circuit modeling of micromachined transitions for interconnecting Coplanar Waveguides (CPW) on silicon to microstrip lines suspended on low-loss membranes. The transition plays a critical role in developing MEMS tunable high-Q filters for Ka-and U-band applications. Exact circuit modeling of the transitions provides methods to design such structures without full-wave simulations. Comparisons between the circuit model results and full-wave simulation results, as well as the experimental results are presented.

Original languageEnglish
Pages (from-to)477-478
Number of pages2
JournalMicrowave and Optical Technology Letters
Issue number2
Publication statusPublished - 2007 Feb

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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