Abstract
This paper demonstrates a hybrid particle classification and condensation device based on both aerodynamics and electrostatics using a micro virtual impactor (QVI). The MVI is capable of classifying the nanoparticles according to their size and condense their number concentration that we are interested. The MVI was fabricated using polymer micromachining. Its classification efficiency was examined using solid particles, polystyrene latex (PSL) ranging from 80 to 250 nm in diameter. Thereafter, specific-sized nanoparticles, NaCl of 50 nm in diameter, were condensed by applying an electric potential of 1.1 kV. As a result, the electric signal detected was amplified by 4 times higher than that when no electric potential was applied. The output signal was amplified by 4 times (before condensation: 4 fA, after condensation: 16 fA).
Original language | English |
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Article number | 4805400 |
Pages (from-to) | 387-390 |
Number of pages | 4 |
Journal | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
DOIs | |
Publication status | Published - 2009 |
Event | 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy Duration: 2009 Jan 25 → 2009 Jan 29 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering