Abstract
The formation of thin amorphous cobalt titanium nitride (CoTiN) layers was investigated using a supercycle method of atomic layer deposition (ALD). The stoichiometry of the resultant ALD CoTiN films was controlled by changing the ratio of Co and TiN thicknesses. X-ray diffraction analysis and transmission electron microscopy observations showed that the microstructure of the ALD Co and TiN was transformed from polycrystalline to amorphous CoTiN. The stoichiometry of the CoTiN layer was affected by the growth characteristics of ALD Co and TiN on each surface. The results revealed that ALD TiN undergoes nucleation incubation on the ALD Co surface, whereas ALD Co does not undergo nucleation incubation on the ALD TiN surface. The properties of the amorphous CoTiN layers were evaluated by diffusion experiments and mechanical tests. Because of the lack of grain boundaries, the CoTiN efficiently blocks the diffusion of Cu at elevated temperatures and exhibits higher hardness compared with ALD Co.
| Original language | English |
|---|---|
| Pages (from-to) | 684-692 |
| Number of pages | 9 |
| Journal | Journal of Alloys and Compounds |
| Volume | 737 |
| DOIs | |
| Publication status | Published - 2018 Mar 15 |
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All Science Journal Classification (ASJC) codes
- Mechanics of Materials
- Mechanical Engineering
- Metals and Alloys
- Materials Chemistry
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Cobalt titanium nitride amorphous metal alloys by atomic layer deposition. / Nam, Taewook; Lee, Chang Wan; Cheon, Taehoon; Lee, Woo Jae; Kim, Soo Hyun; Kwon, Se Hun; Lee, Han Bo Ram; Kim, Hyungjun.
In: Journal of Alloys and Compounds, Vol. 737, 15.03.2018, p. 684-692.Research output: Contribution to journal › Article
TY - JOUR
T1 - Cobalt titanium nitride amorphous metal alloys by atomic layer deposition
AU - Nam, Taewook
AU - Lee, Chang Wan
AU - Cheon, Taehoon
AU - Lee, Woo Jae
AU - Kim, Soo Hyun
AU - Kwon, Se Hun
AU - Lee, Han Bo Ram
AU - Kim, Hyungjun
PY - 2018/3/15
Y1 - 2018/3/15
N2 - The formation of thin amorphous cobalt titanium nitride (CoTiN) layers was investigated using a supercycle method of atomic layer deposition (ALD). The stoichiometry of the resultant ALD CoTiN films was controlled by changing the ratio of Co and TiN thicknesses. X-ray diffraction analysis and transmission electron microscopy observations showed that the microstructure of the ALD Co and TiN was transformed from polycrystalline to amorphous CoTiN. The stoichiometry of the CoTiN layer was affected by the growth characteristics of ALD Co and TiN on each surface. The results revealed that ALD TiN undergoes nucleation incubation on the ALD Co surface, whereas ALD Co does not undergo nucleation incubation on the ALD TiN surface. The properties of the amorphous CoTiN layers were evaluated by diffusion experiments and mechanical tests. Because of the lack of grain boundaries, the CoTiN efficiently blocks the diffusion of Cu at elevated temperatures and exhibits higher hardness compared with ALD Co.
AB - The formation of thin amorphous cobalt titanium nitride (CoTiN) layers was investigated using a supercycle method of atomic layer deposition (ALD). The stoichiometry of the resultant ALD CoTiN films was controlled by changing the ratio of Co and TiN thicknesses. X-ray diffraction analysis and transmission electron microscopy observations showed that the microstructure of the ALD Co and TiN was transformed from polycrystalline to amorphous CoTiN. The stoichiometry of the CoTiN layer was affected by the growth characteristics of ALD Co and TiN on each surface. The results revealed that ALD TiN undergoes nucleation incubation on the ALD Co surface, whereas ALD Co does not undergo nucleation incubation on the ALD TiN surface. The properties of the amorphous CoTiN layers were evaluated by diffusion experiments and mechanical tests. Because of the lack of grain boundaries, the CoTiN efficiently blocks the diffusion of Cu at elevated temperatures and exhibits higher hardness compared with ALD Co.
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U2 - 10.1016/j.jallcom.2017.12.023
DO - 10.1016/j.jallcom.2017.12.023
M3 - Article
VL - 737
SP - 684
EP - 692
JO - Journal of Alloys and Compounds
JF - Journal of Alloys and Compounds
SN - 0925-8388
ER -