Comparative studies of atomic layer deposition and plasma-enhanced atomic layer deposition Ta2O5 and the effects on electrical properties of In situ nitridation

Wan Joo Maeng, Jae Woong Lee, Jae Min Myoung, Hyungjun Kim

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Comparative studies of atomic layer deposition and plasma-enhanced atomic layer deposition Ta<sub>2</sub>O<sub>5</sub> and the effects on electrical properties of In situ nitridation'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy