Comparison of solution-processed and sputtered indium gallium zinc oxide thin film transistors for display applications

Marcus Herrmann, Steffen Hoehla, Norbert Fruehauf, Dong Lim Kim, Sang Hoon Oh, Hyun Jae Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We have compared bottom gate TFTs produced within an international collaboration using sputtered as well as spin coated solution-based IGZO. The optimized material compositions and the processing conditions were varied due to the difference of deposition methods.

Original languageEnglish
Title of host publication31st International Display Research Conference 2011, EuroDisplay 2011
Pages353-356
Number of pages4
Publication statusPublished - 2011 Dec 1
Event31st International Display Research Conference 2011, EuroDisplay 2011 - Arcachon, France
Duration: 2011 Sep 192011 Sep 22

Other

Other31st International Display Research Conference 2011, EuroDisplay 2011
CountryFrance
CityArcachon
Period11/9/1911/9/22

Fingerprint

Gallium
Thin film transistors
Zinc oxide
Indium
Oxide films
Display devices
Processing
Chemical analysis

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Herrmann, M., Hoehla, S., Fruehauf, N., Kim, D. L., Oh, S. H., & Kim, H. J. (2011). Comparison of solution-processed and sputtered indium gallium zinc oxide thin film transistors for display applications. In 31st International Display Research Conference 2011, EuroDisplay 2011 (pp. 353-356)
Herrmann, Marcus ; Hoehla, Steffen ; Fruehauf, Norbert ; Kim, Dong Lim ; Oh, Sang Hoon ; Kim, Hyun Jae. / Comparison of solution-processed and sputtered indium gallium zinc oxide thin film transistors for display applications. 31st International Display Research Conference 2011, EuroDisplay 2011. 2011. pp. 353-356
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author = "Marcus Herrmann and Steffen Hoehla and Norbert Fruehauf and Kim, {Dong Lim} and Oh, {Sang Hoon} and Kim, {Hyun Jae}",
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Herrmann, M, Hoehla, S, Fruehauf, N, Kim, DL, Oh, SH & Kim, HJ 2011, Comparison of solution-processed and sputtered indium gallium zinc oxide thin film transistors for display applications. in 31st International Display Research Conference 2011, EuroDisplay 2011. pp. 353-356, 31st International Display Research Conference 2011, EuroDisplay 2011, Arcachon, France, 11/9/19.

Comparison of solution-processed and sputtered indium gallium zinc oxide thin film transistors for display applications. / Herrmann, Marcus; Hoehla, Steffen; Fruehauf, Norbert; Kim, Dong Lim; Oh, Sang Hoon; Kim, Hyun Jae.

31st International Display Research Conference 2011, EuroDisplay 2011. 2011. p. 353-356.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Herrmann M, Hoehla S, Fruehauf N, Kim DL, Oh SH, Kim HJ. Comparison of solution-processed and sputtered indium gallium zinc oxide thin film transistors for display applications. In 31st International Display Research Conference 2011, EuroDisplay 2011. 2011. p. 353-356