Compensation effect of boron and nitrogen codoping on the hardness and electrical resistivity of diamond-like carbon films prepared by magnetron sputtering deposition

Chang Sun Park, Sun Gyu Choi, Hyung Ho Park, Jin Nyoung Jang, Munpyo Hong, Kwang Ho Kwon

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Nitrogen (N) and boron (B) codoped diamond-like carbon (DLC) films were prepared on silicon oxide substrates by RF magnetron sputtering to optimize the electrical conductivity and hardness of DLC film. The electrical conductivity and hardness of the N-B codoped DLC films were controlled simultaneously by varying N2M flow rate with fixed B target power and varying B target power with fixed N2flow rate. The electrical resistivity of the B-doped DLC films showed a cup-shaped relationship with B target power and a U-shaped relationship with the N-B codoped DLC film. However, hardness of the B-doped DLC films showed a decreasing behavior but it was maintained almost constant for the N-B codoped DLC film. These particular electrical and hardness behaviors of the N-B codoped DLC films could be explained by a neutralization effect of N and B codoping.

Original languageEnglish
Pages (from-to)3027-3032
Number of pages6
JournalJournal of Materials Research
Volume27
Issue number23
DOIs
Publication statusPublished - 2012 Oct 3

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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