Compensation of repeatable and nonrepeatable disturbances in high NA SIL-based near-field storage systems

Jung Gon Kim, No Cheol Park

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fingerprint Dive into the research topics of 'Compensation of repeatable and nonrepeatable disturbances in high NA SIL-based near-field storage systems'. Together they form a unique fingerprint.

Engineering & Materials Science