Conductor-loss reduction for high-frequency transmission lines based on the magnetorheological-fluid polishing method

Sang No Lee, Joon Ik Lee, Wook Bae Kim, Jong Gwan Yook, Yong-Jun Kim, Sang Jo Lee

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

In this paper, a novel polishing method using magnetorheological (MR) fluid is presented in order to improve conductor-surface roughness and achieve high-frequency performance of the electroplated three-dimensional (3D) CPW, where the MR fluid is utilized to efficiently polish uneven and imperfect conductor surfaces resulting from the widely used MEMS process. For the purpose of comparison, two 50Ω CPW lines on glass substrate are fabricated in order to validate the performance of the proposed polishing scheme. From the measurement, the polished CPW lines using the MR fluid show much lower attenuation constants up to a maximum of 0.3-0.54 dB/cm than unpolished CPW lines, according to the geometries used. Thus, it is clear that the proposed MR fluid-based polishing scheme is very effective when used to smooth 3D high-frequency structures and can dramatically improve conductor-loss characteristics.

Original languageEnglish
Pages (from-to)405-407
Number of pages3
JournalMicrowave and Optical Technology Letters
Volume42
Issue number5
DOIs
Publication statusPublished - 2004 Sep 5

Fingerprint

Magnetorheological fluids
magnetorheological fluids
Polishing
polishing
transmission lines
Electric lines
conductors
Industrial Oils
microelectromechanical systems
MEMS
surface roughness
Surface roughness
attenuation
Glass
Geometry
glass
Substrates
geometry

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

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abstract = "In this paper, a novel polishing method using magnetorheological (MR) fluid is presented in order to improve conductor-surface roughness and achieve high-frequency performance of the electroplated three-dimensional (3D) CPW, where the MR fluid is utilized to efficiently polish uneven and imperfect conductor surfaces resulting from the widely used MEMS process. For the purpose of comparison, two 50Ω CPW lines on glass substrate are fabricated in order to validate the performance of the proposed polishing scheme. From the measurement, the polished CPW lines using the MR fluid show much lower attenuation constants up to a maximum of 0.3-0.54 dB/cm than unpolished CPW lines, according to the geometries used. Thus, it is clear that the proposed MR fluid-based polishing scheme is very effective when used to smooth 3D high-frequency structures and can dramatically improve conductor-loss characteristics.",
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Conductor-loss reduction for high-frequency transmission lines based on the magnetorheological-fluid polishing method. / Lee, Sang No; Lee, Joon Ik; Kim, Wook Bae; Yook, Jong Gwan; Kim, Yong-Jun; Lee, Sang Jo.

In: Microwave and Optical Technology Letters, Vol. 42, No. 5, 05.09.2004, p. 405-407.

Research output: Contribution to journalArticle

TY - JOUR

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AU - Lee, Sang No

AU - Lee, Joon Ik

AU - Kim, Wook Bae

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AU - Kim, Yong-Jun

AU - Lee, Sang Jo

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AB - In this paper, a novel polishing method using magnetorheological (MR) fluid is presented in order to improve conductor-surface roughness and achieve high-frequency performance of the electroplated three-dimensional (3D) CPW, where the MR fluid is utilized to efficiently polish uneven and imperfect conductor surfaces resulting from the widely used MEMS process. For the purpose of comparison, two 50Ω CPW lines on glass substrate are fabricated in order to validate the performance of the proposed polishing scheme. From the measurement, the polished CPW lines using the MR fluid show much lower attenuation constants up to a maximum of 0.3-0.54 dB/cm than unpolished CPW lines, according to the geometries used. Thus, it is clear that the proposed MR fluid-based polishing scheme is very effective when used to smooth 3D high-frequency structures and can dramatically improve conductor-loss characteristics.

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