Conductor roughness reduced low-loss coplanar waveguides on low resistivity silicon by employing magnetorheological finishing

Sang No Lee, Jong Gwan Yook, Sung Jun Park, Joon Ik Lee, Yong Jun Kim, Sang Jo Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

This paper presents a surface finishing method based on magnetorheological (MR) fluid to obtain low-loss coplanar waveguides on low resistivity silicon. CPWs with different lateral dimension but having identical 50 Ω characteristic impedance are evaluated. In addition, finite ground effects on CPW performances before and after magnetorheological finishing (MRF) are investigated. In all cases, CPWs treated with the MR fluid-based finishing method reveal much lower attenuation constants compared to original ones owing to reduced conductor roughness. The proposed MRF scheme can be applied to smoothen three dimensional high frequency structures and dramatically improve conductor roughness.

Original languageEnglish
Title of host publication2005 IEEE MTT-S International Microwave Symposium Digest
Pages2151-2154
Number of pages4
DOIs
Publication statusPublished - 2005
Event2005 IEEE MTT-S International Microwave Symposium - Long Beach, CA, United States
Duration: 2005 Jun 122005 Jun 17

Publication series

NameIEEE MTT-S International Microwave Symposium Digest
Volume2005
ISSN (Print)0149-645X

Other

Other2005 IEEE MTT-S International Microwave Symposium
CountryUnited States
CityLong Beach, CA
Period05/6/1205/6/17

All Science Journal Classification (ASJC) codes

  • Radiation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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