Conductor roughness reduced low-loss coplanar waveguides on low resistivity silicon by employing magnetorheological finishing

Sang No Lee; Jong Gwan Yook; Sung Jun Park; Joon Ik Lee; Yong Jun Kim; Sang Jo Lee

doi:10.1109/MWSYM.2005.1517175

Conductor roughness reduced low-loss coplanar waveguides on low resistivity silicon by employing magnetorheological finishing

Sang No Lee, Jong Gwan Yook, Sung Jun Park, Joon Ik Lee, Yong Jun Kim, Sang Jo Lee

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

This paper presents a surface finishing method based on magnetorheological (MR) fluid to obtain low-loss coplanar waveguides on low resistivity silicon. CPWs with different lateral dimension but having identical 50 Ω characteristic impedance are evaluated. In addition, finite ground effects on CPW performances before and after magnetorheological finishing (MRF) are investigated. In all cases, CPWs treated with the MR fluid-based finishing method reveal much lower attenuation constants compared to original ones owing to reduced conductor roughness. The proposed MRF scheme can be applied to smoothen three dimensional high frequency structures and dramatically improve conductor roughness.

Original language	English
Title of host publication	2005 IEEE MTT-S International Microwave Symposium Digest
Pages	2151-2154
Number of pages	4
DOIs	https://doi.org/10.1109/MWSYM.2005.1517175
Publication status	Published - 2005
Event	2005 IEEE MTT-S International Microwave Symposium - Long Beach, CA, United States Duration: 2005 Jun 12 → 2005 Jun 17

Publication series

Name	IEEE MTT-S International Microwave Symposium Digest
Volume	2005
ISSN (Print)	0149-645X

Other

Other	2005 IEEE MTT-S International Microwave Symposium
Country/Territory	United States
City	Long Beach, CA
Period	05/6/12 → 05/6/17

All Science Journal Classification (ASJC) codes

Radiation
Condensed Matter Physics
Electrical and Electronic Engineering

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10.1109/MWSYM.2005.1517175

Cite this

Lee, S. N., Yook, J. G., Park, S. J., Lee, J. I., Kim, Y. J., & Lee, S. J. (2005). Conductor roughness reduced low-loss coplanar waveguides on low resistivity silicon by employing magnetorheological finishing. In 2005 IEEE MTT-S International Microwave Symposium Digest (pp. 2151-2154). [1517175] (IEEE MTT-S International Microwave Symposium Digest; Vol. 2005). https://doi.org/10.1109/MWSYM.2005.1517175

@inproceedings{a514fe3ab0364d30acc4fabb900745d2,

title = "Conductor roughness reduced low-loss coplanar waveguides on low resistivity silicon by employing magnetorheological finishing",

abstract = "This paper presents a surface finishing method based on magnetorheological (MR) fluid to obtain low-loss coplanar waveguides on low resistivity silicon. CPWs with different lateral dimension but having identical 50 Ω characteristic impedance are evaluated. In addition, finite ground effects on CPW performances before and after magnetorheological finishing (MRF) are investigated. In all cases, CPWs treated with the MR fluid-based finishing method reveal much lower attenuation constants compared to original ones owing to reduced conductor roughness. The proposed MRF scheme can be applied to smoothen three dimensional high frequency structures and dramatically improve conductor roughness.",

author = "Lee, {Sang No} and Yook, {Jong Gwan} and Park, {Sung Jun} and Lee, {Joon Ik} and Kim, {Yong Jun} and Lee, {Sang Jo}",

year = "2005",

doi = "10.1109/MWSYM.2005.1517175",

language = "English",

isbn = "0780388461",

series = "IEEE MTT-S International Microwave Symposium Digest",

pages = "2151--2154",

booktitle = "2005 IEEE MTT-S International Microwave Symposium Digest",

note = "2005 IEEE MTT-S International Microwave Symposium ; Conference date: 12-06-2005 Through 17-06-2005",

}

Lee, SN, Yook, JG, Park, SJ, Lee, JI, Kim, YJ & Lee, SJ 2005, Conductor roughness reduced low-loss coplanar waveguides on low resistivity silicon by employing magnetorheological finishing. in 2005 IEEE MTT-S International Microwave Symposium Digest., 1517175, IEEE MTT-S International Microwave Symposium Digest, vol. 2005, pp. 2151-2154, 2005 IEEE MTT-S International Microwave Symposium, Long Beach, CA, United States, 05/6/12. https://doi.org/10.1109/MWSYM.2005.1517175

Conductor roughness reduced low-loss coplanar waveguides on low resistivity silicon by employing magnetorheological finishing. / Lee, Sang No; Yook, Jong Gwan; Park, Sung Jun et al.

2005 IEEE MTT-S International Microwave Symposium Digest. 2005. p. 2151-2154 1517175 (IEEE MTT-S International Microwave Symposium Digest; Vol. 2005).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Lee, Sang No

AU - Yook, Jong Gwan

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AU - Kim, Yong Jun

AU - Lee, Sang Jo

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N2 - This paper presents a surface finishing method based on magnetorheological (MR) fluid to obtain low-loss coplanar waveguides on low resistivity silicon. CPWs with different lateral dimension but having identical 50 Ω characteristic impedance are evaluated. In addition, finite ground effects on CPW performances before and after magnetorheological finishing (MRF) are investigated. In all cases, CPWs treated with the MR fluid-based finishing method reveal much lower attenuation constants compared to original ones owing to reduced conductor roughness. The proposed MRF scheme can be applied to smoothen three dimensional high frequency structures and dramatically improve conductor roughness.

AB - This paper presents a surface finishing method based on magnetorheological (MR) fluid to obtain low-loss coplanar waveguides on low resistivity silicon. CPWs with different lateral dimension but having identical 50 Ω characteristic impedance are evaluated. In addition, finite ground effects on CPW performances before and after magnetorheological finishing (MRF) are investigated. In all cases, CPWs treated with the MR fluid-based finishing method reveal much lower attenuation constants compared to original ones owing to reduced conductor roughness. The proposed MRF scheme can be applied to smoothen three dimensional high frequency structures and dramatically improve conductor roughness.

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T3 - IEEE MTT-S International Microwave Symposium Digest

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Conductor roughness reduced low-loss coplanar waveguides on low resistivity silicon by employing magnetorheological finishing

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