Construction of injection mold with MEMS RTD sensor and MEMS heater for micro/nano molding process

Youngmin Kim, Yong Choi, Young Joo Kim, Shinill Kang

Research output: Contribution to journalArticle

7 Citations (Scopus)


It is a very critical process to control the temperature of stamper surface in the micro/nano molding. During the filling stage, the polymer melt in the vicinity of the stamper surfaces rapidly solidifies and the solidified layer greatly deteriorates the transcribability and fluidity of polymer melt. To improve the transcribability and fluidity of polymer melt, stamper surface temperature should be controlled such that the growth of the solidified layer is delayed during the filling stage. In this study, an injection mold was prepared with microelectromechanical systems (MEMS) resistance temperature detector (RTD) sensor and MEMS heater to increase the stamper surface temperature over the glass transition temperature during the filling stage. We could control the stamper surface temperature up to 100°C within a few seconds using the fabricated MEMS heater. Finally, the high density optical disc substrates were replicated using the injection mold with MEMS heater and MEMS sensor.

Original languageEnglish
Pages (from-to)3591-3595
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Issue number5 B
Publication statusPublished - 2005 May 1


All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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