Contact-pressing metallization

Dahl Young Khang, Hong H. Lee

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Direct contact-pressing metallization is introduced and demonstrated as a method for metallization. In this contact-pressing metallization, a free sheet of metal or a deposited film supported on a polymer-coated carrier wafer is placed on a substrate with contact or via holes and then pressed against the substrate between the platens of a hydraulic press. Plastic deformation caused by high temperature pressing is the mechanism by which the holes are filled. This conceptually simple and yet effective method can be an alternative to other metallization techniques.

Original languageEnglish
Pages (from-to)1667-1690
Number of pages24
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume19
Issue number5
Publication statusPublished - 2001 Sep 1

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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