Contact-pressure reduction of pyramidal optical probe array on corrugated aluminium/silicon nitride membranes

Jinhee Jang, Seonghyeon Oh, Jae Won Hahn

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

In this study, we develop an optical contact probe array for scanning near-field lithography. We fabricate the optical probes with a pyramidal tip array on an aluminium/silicon nitride composite membrane. Here, we reduce the contact pressure using the corrugations on the silicon nitride membrane and the flattened surface on top of the tip. After fabricating the 5 5 probes in the array, we evaluate the contact pressure using the force-distance curve obtained by an atomic force microscope. The spring constants of the corrugated membranes are 10 0.6 N m -1 . The contact pressure on a flattened 295 nm in-radius is calculated to be approximately 33 MPa for a 300 nm deflection. This value is 22 times smaller than that of a sharp pyramidal tip of 20 nm in-radius on a flat membrane.

Original languageEnglish
Article number045014
JournalJournal of Micromechanics and Microengineering
Volume27
Issue number4
DOIs
Publication statusPublished - 2017 Mar 10

Fingerprint

Aluminum
Silicon nitride
Membranes
Composite membranes
Lithography
Microscopes
Scanning
silicon nitride

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

@article{32abe0c1a573478296d255b5f2341d76,
title = "Contact-pressure reduction of pyramidal optical probe array on corrugated aluminium/silicon nitride membranes",
abstract = "In this study, we develop an optical contact probe array for scanning near-field lithography. We fabricate the optical probes with a pyramidal tip array on an aluminium/silicon nitride composite membrane. Here, we reduce the contact pressure using the corrugations on the silicon nitride membrane and the flattened surface on top of the tip. After fabricating the 5 5 probes in the array, we evaluate the contact pressure using the force-distance curve obtained by an atomic force microscope. The spring constants of the corrugated membranes are 10 0.6 N m -1 . The contact pressure on a flattened 295 nm in-radius is calculated to be approximately 33 MPa for a 300 nm deflection. This value is 22 times smaller than that of a sharp pyramidal tip of 20 nm in-radius on a flat membrane.",
author = "Jinhee Jang and Seonghyeon Oh and Hahn, {Jae Won}",
year = "2017",
month = "3",
day = "10",
doi = "10.1088/1361-6439/aa62b4",
language = "English",
volume = "27",
journal = "Journal of Micromechanics and Microengineering",
issn = "0960-1317",
publisher = "IOP Publishing Ltd.",
number = "4",

}

Contact-pressure reduction of pyramidal optical probe array on corrugated aluminium/silicon nitride membranes. / Jang, Jinhee; Oh, Seonghyeon; Hahn, Jae Won.

In: Journal of Micromechanics and Microengineering, Vol. 27, No. 4, 045014, 10.03.2017.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Contact-pressure reduction of pyramidal optical probe array on corrugated aluminium/silicon nitride membranes

AU - Jang, Jinhee

AU - Oh, Seonghyeon

AU - Hahn, Jae Won

PY - 2017/3/10

Y1 - 2017/3/10

N2 - In this study, we develop an optical contact probe array for scanning near-field lithography. We fabricate the optical probes with a pyramidal tip array on an aluminium/silicon nitride composite membrane. Here, we reduce the contact pressure using the corrugations on the silicon nitride membrane and the flattened surface on top of the tip. After fabricating the 5 5 probes in the array, we evaluate the contact pressure using the force-distance curve obtained by an atomic force microscope. The spring constants of the corrugated membranes are 10 0.6 N m -1 . The contact pressure on a flattened 295 nm in-radius is calculated to be approximately 33 MPa for a 300 nm deflection. This value is 22 times smaller than that of a sharp pyramidal tip of 20 nm in-radius on a flat membrane.

AB - In this study, we develop an optical contact probe array for scanning near-field lithography. We fabricate the optical probes with a pyramidal tip array on an aluminium/silicon nitride composite membrane. Here, we reduce the contact pressure using the corrugations on the silicon nitride membrane and the flattened surface on top of the tip. After fabricating the 5 5 probes in the array, we evaluate the contact pressure using the force-distance curve obtained by an atomic force microscope. The spring constants of the corrugated membranes are 10 0.6 N m -1 . The contact pressure on a flattened 295 nm in-radius is calculated to be approximately 33 MPa for a 300 nm deflection. This value is 22 times smaller than that of a sharp pyramidal tip of 20 nm in-radius on a flat membrane.

UR - http://www.scopus.com/inward/record.url?scp=85016468458&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85016468458&partnerID=8YFLogxK

U2 - 10.1088/1361-6439/aa62b4

DO - 10.1088/1361-6439/aa62b4

M3 - Article

VL - 27

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

IS - 4

M1 - 045014

ER -