Continuous roll nano-imprinting technology for large-scale nano- and microstructures

Shinill Kang, Suho Ann, Seok min Kim

Research output: Chapter in Book/Report/Conference proceedingChapter

1 Citation (Scopus)

Abstract

A continuous roll nano-imprinting process is regarded as one of the most promising technologies for realizing large-scale nano- and microstructures at low cost. This technique is applicable to mass production of devices in fields such as digital displays, nano energy, nano data storage etc. This chapter explains some fabrication methods for making roll stamps and key issues in thermal and UV roll nano-imprinting processes.

Original languageEnglish
Title of host publicationNanostructures in Electronics and Photonics
PublisherPan Stanford Publishing Pte. Ltd.
Pages237-250
Number of pages14
ISBN (Print)9789814241106
DOIs
Publication statusPublished - 2008 Apr 1

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)
  • Engineering(all)

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    Kang, S., Ann, S., & Kim, S. M. (2008). Continuous roll nano-imprinting technology for large-scale nano- and microstructures. In Nanostructures in Electronics and Photonics (pp. 237-250). Pan Stanford Publishing Pte. Ltd.. https://doi.org/10.4032/9789814241120