Continuous ultraviolet roll nanoimprinting process for replicating large-scale nano- and micropatterns

Suho Ahn, Joowon Cha, Ho Myung, Seok Min Kim, Shinill Kang

Research output: Contribution to journalArticle

93 Citations (Scopus)

Abstract

With the increasing demand for large-scale nano- and micropatterns in the field of digital displays, nano- and micropattern replication technology has become a research priority. In this study, a continuous ultraviolet (UV) roll nanoimprinting process using a pattern roll stamper for the replication of large-scale nano- and micropatterns was designed and constructed. Several flexible nano- and micropatterns with large areas were fabricated and analyzed as tests of this continuous UV imprinting process.

Original languageEnglish
Article number213101
JournalApplied Physics Letters
Volume89
Issue number21
DOIs
Publication statusPublished - 2006

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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