Continuous ultraviolet roll nanoimprinting process for replicating large-scale nano- and micropatterns

Suho Ahn, Joowon Cha, Ho Myung, Seok Min Kim, Shinill Kang

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93 Citations (Scopus)

Abstract

With the increasing demand for large-scale nano- and micropatterns in the field of digital displays, nano- and micropattern replication technology has become a research priority. In this study, a continuous ultraviolet (UV) roll nanoimprinting process using a pattern roll stamper for the replication of large-scale nano- and micropatterns was designed and constructed. Several flexible nano- and micropatterns with large areas were fabricated and analyzed as tests of this continuous UV imprinting process.

Original languageEnglish
Article number213101
JournalApplied Physics Letters
Volume89
Issue number21
DOIs
Publication statusPublished - 2006

Bibliographical note

Funding Information:
This research was supported by a grant from the National Research Laboratory program (M10400000321-05J0000-32110), which is supported by the Ministry of Science and Technology, Korea.

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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