Control of glass infiltration at the Al2O3/Glass/Al2O3 interface

Tae Jin Jo, Dong Hun Yeo, Hyo Soon Shin, Youn Woo Hong, Yong Soo Cho

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1 Citation (Scopus)

Abstract

A zero-shrinkage sintering process in which the shrinkage of the x-y axis is controlled to be zero is in great demand due to the high integration trend in ceramic modules. Among the zero-shrinkage sintering processes available, the glass infiltration method proposed in the preliminary study with an Al2O3/Glass/Al2O3 structure is one promising method. However, problems exist in regard to the glass infiltration method, including partially incomplete joining between Al2O3 and glass layers due to the precipitate of Ti-Pb rich phase during the sintering process. Therefore, we wish to solve the de-lamination problems and suggest a mechanism for delamination and the solutions in the zeroshrinkage low temperature co-fired ceramic (LTCC) layers. The de-lamination. problems diminished using the Pb-BSi-O glass without TiO2 in Pb-B-Ti-Si-O glass and produced a very dense zero-shrinkage LTCC.

Original languageEnglish
Pages (from-to)32-34
Number of pages3
JournalTransactions on Electrical and Electronic Materials
Volume12
Issue number1
DOIs
Publication statusPublished - 2011 Feb

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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