Controlled super-lateral growth of Si films for microstructural manipulation and optimization

J. S. Im, M. A. Crowder, R. S. Sposili, J. P. Leonard, Hyun Jae Kim, J. H. Yoon, V. V. Gupta, H. Jin Song, H. S. Cho

Research output: Contribution to journalArticle

152 Citations (Scopus)

Abstract

This paper reviews a particular form of pulsed-laser-based thin-film crystallization method referred to as controlled super-lateral growth (C-SLG). By systematically manipulating and controlling the locations, shapes, and extent of melting induced by the incident laser pulses, the C-SLG approach - notably in a version referred to as sequential lateral solidification (SLS) - can lead to realization of a variety of microstructurally designed crystalline Si films with low structural defect densities, including 1. large-grained and grain-boundary-location controlled polycrystalline films, 2. directionally solidified microstructures, or 3. location-controlled single-crystal regions.

Original languageEnglish
Pages (from-to)603-617
Number of pages15
JournalPhysica Status Solidi (A) Applied Research
Volume166
Issue number2
DOIs
Publication statusPublished - 1998 Jan 1

Fingerprint

manipulators
optimization
Defect density
Crystallization
Pulsed lasers
solidification
Solidification
Laser pulses
pulsed lasers
Grain boundaries
Melting
grain boundaries
melting
Single crystals
crystallization
Crystalline materials
Thin films
microstructure
Microstructure
single crystals

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Im, J. S. ; Crowder, M. A. ; Sposili, R. S. ; Leonard, J. P. ; Kim, Hyun Jae ; Yoon, J. H. ; Gupta, V. V. ; Song, H. Jin ; Cho, H. S. / Controlled super-lateral growth of Si films for microstructural manipulation and optimization. In: Physica Status Solidi (A) Applied Research. 1998 ; Vol. 166, No. 2. pp. 603-617.
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Controlled super-lateral growth of Si films for microstructural manipulation and optimization. / Im, J. S.; Crowder, M. A.; Sposili, R. S.; Leonard, J. P.; Kim, Hyun Jae; Yoon, J. H.; Gupta, V. V.; Song, H. Jin; Cho, H. S.

In: Physica Status Solidi (A) Applied Research, Vol. 166, No. 2, 01.01.1998, p. 603-617.

Research output: Contribution to journalArticle

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