Controlling etch properties of silicon-based anti-reflective spin-on hardmask materials

Sang Kyun Kim, Hyeon Mo Cho, Changsoo Woo, Sang Ran Koh, Mi Young Kim, Hui Chan Yoon, Woojin Lee, Seung Wook Shin, Jong Seob Kim, Tuwon Chang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

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