Controlling optical properties of Ge-on-Si by thermal annealing and etching process

Chulwon Lee; Bugeun Ki; Yang Seok Yoo; Min Ho Jang; Jungwoo Oh; Yong Hoon Cho

doi:10.1109/CLEOPR.2015.7375929

Controlling optical properties of Ge-on-Si by thermal annealing and etching process

Chulwon Lee, Bugeun Ki, Yang Seok Yoo, Min Ho Jang, Jungwoo Oh, Yong Hoon Cho

School of Integrated Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We studied optical properties of thermally annealed Ge-on-Si. From Raman experiments, tensile strain as well as Si-Ge intermixing were investigated. Significant Γ-band transition peak-shift was confirmed by photoluminescence depending on the thermal annealing conditions.

Original language	English
Title of host publication	2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781467371094
DOIs	https://doi.org/10.1109/CLEOPR.2015.7375929
Publication status	Published - 2016 Jan 7
Event	11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015 - Busan, Korea, Republic of Duration: 2015 Aug 24 → 2015 Aug 28

Publication series

Name	2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015
Volume	1

Other

Other	11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015
Country	Korea, Republic of
City	Busan
Period	15/8/24 → 15/8/28

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering
Atomic and Molecular Physics, and Optics

Access to Document

10.1109/CLEOPR.2015.7375929

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Lee, C., Ki, B., Yoo, Y. S., Jang, M. H., Oh, J., & Cho, Y. H. (2016). Controlling optical properties of Ge-on-Si by thermal annealing and etching process. In 2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015 [7375929] (2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015; Vol. 1). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CLEOPR.2015.7375929

Lee, Chulwon ; Ki, Bugeun ; Yoo, Yang Seok ; Jang, Min Ho ; Oh, Jungwoo ; Cho, Yong Hoon. / Controlling optical properties of Ge-on-Si by thermal annealing and etching process. 2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015. Institute of Electrical and Electronics Engineers Inc., 2016. (2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015).

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title = "Controlling optical properties of Ge-on-Si by thermal annealing and etching process",

abstract = "We studied optical properties of thermally annealed Ge-on-Si. From Raman experiments, tensile strain as well as Si-Ge intermixing were investigated. Significant Γ-band transition peak-shift was confirmed by photoluminescence depending on the thermal annealing conditions.",

author = "Chulwon Lee and Bugeun Ki and Yoo, {Yang Seok} and Jang, {Min Ho} and Jungwoo Oh and Cho, {Yong Hoon}",

year = "2016",

month = jan,

day = "7",

doi = "10.1109/CLEOPR.2015.7375929",

language = "English",

series = "2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015",

address = "United States",

note = "11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015 ; Conference date: 24-08-2015 Through 28-08-2015",

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Lee, C, Ki, B, Yoo, YS, Jang, MH, Oh, J & Cho, YH 2016, Controlling optical properties of Ge-on-Si by thermal annealing and etching process. in 2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015., 7375929, 2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015, vol. 1, Institute of Electrical and Electronics Engineers Inc., 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015, Busan, Korea, Republic of, 15/8/24. https://doi.org/10.1109/CLEOPR.2015.7375929

Controlling optical properties of Ge-on-Si by thermal annealing and etching process. / Lee, Chulwon; Ki, Bugeun; Yoo, Yang Seok; Jang, Min Ho; Oh, Jungwoo; Cho, Yong Hoon.

2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015. Institute of Electrical and Electronics Engineers Inc., 2016. 7375929 (2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015; Vol. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Cho, Yong Hoon

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BT - 2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015

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Lee C, Ki B, Yoo YS, Jang MH, Oh J, Cho YH. Controlling optical properties of Ge-on-Si by thermal annealing and etching process. In 2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015. Institute of Electrical and Electronics Engineers Inc. 2016. 7375929. (2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015). https://doi.org/10.1109/CLEOPR.2015.7375929