Controlling the defects and transition layer in SiO2 films grown on 4H-SiC via direct plasma-assisted oxidation

Dae Kyoung Kim, Kwang Sik Jeong, Yu Seon Kang, Hang Kyu Kang, Sang W. Cho, Sang Ok Kim, Dongchan Suh, Sunjung Kim, Mann Ho Cho

Research output: Contribution to journalArticlepeer-review

25 Citations (Scopus)

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Chemistry

Material Science