Correction: Selective Area Epitaxy of Complex Oxide Heterostructures on Si by Oxide Hard Mask Lift-Off (Electronic Materials Letters, (2023), 19, 2, (192-199), 10.1007/s13391-022-00386-0)

Ruiguang Ning, Soo Young Jung, Haneul Choi, Byeong hyeon Lee, Min Seok Kim, Hyung Jin Choi, Jun Young Lee, Jin Soo Park, Sung Jin Jung, Ho Won Jang, Sung Ok Won, Hye Jung Chang, Ji Soo Jang, Kyu Hyoung Lee, Byung Chul Lee, Seung Hyub Baek

Research output: Contribution to journalComment/debatepeer-review

Abstract

In the original publication of the article the following references were missing and the missed references are given int his correction Cho, J.-H., Boampong, A.A., Kim, M.-H.: Selective etching of dielectric buffer layer for organic ferroelectric memory cell. Electron. Mater. Lett. 17, 406–413 (2021) Zhang, X., Yang, C., Zhang, Y., Hu, A., Li, M., Gao, L., Ling, H., Hang, T.: Sub-surface damage of ultra-thin monocrystalline silicon wafer induced by dry polishing. Electron. Mater. Lett. 16, 355–362 (2020) Kim, T.M., Sim, H.S., Jeon, J.W.: Development of a vaporizerfor gradual vaporization control of precursor materials in the CVD process. Electron. Mater. Lett. 17, 250–259(2021)Byun, D.-W., Lee, Y.-J., Oh, J.-M., Schweitz, M.A.,Koo, S.-M.: Morphological and electrical properties ofβ-Ga2O3/4H-SiC heterojunction diodes. Electron. Mater. Lett. 17, 479–484 (2021)The original article has been corrected.

Original languageEnglish
Pages (from-to)200
Number of pages1
JournalElectronic Materials Letters
Volume19
Issue number2
DOIs
Publication statusPublished - 2023 Mar

Bibliographical note

Publisher Copyright:
© 2022 The Author(s) under exclusive licence to The Korean Institute of Metals and Materials.

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials

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