Coupled self-assembled monolayer for enhancement of Cu diffusion barrier and adhesion properties

Yongwon Chung, Sanggeun Lee, Chandreswar Mahata, Jungmok Seo, Seung Min Lim, Min Su Jeong, Hanearl Jung, Young Chang Joo, Young Bae Park, Hyungjun Kim, Taeyoon Lee

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science