Damp heat stability of ZnO:Ga thin films on glass substrate

Jong Ho Kang, Dae Wook Kim, Myung Hyun Lee, Young Soo Lim, Won Seon Seo, Heon-Jin Choi, Jung Sik Bang, Hyun Woo Jang, Deuk Yong Lee

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

We investigated the damp heat stability of Ga-doped ZnO (GZO) thin films grown on glass substrates. GZO thin films with thicknesses of 150 nm were grown on glass substrates by rf-magnetron sputtering. After the deposition, a damp heat stability test was performed at various temperature (50 ∼ 65 °C) and relative humidities (80 ∼ 90%) for up to 240 hr. With increasing temperature and humidity, the sheet resistance of the GZO thin films increased to a maximum of 14.2% at 65 °C/90% RH. The changes of surface morphology caused by damp heat were drastic and were comparable to the degradation caused by high temperature only. The effect of damp heat is discussed based on the electrical and the structural characterizations.

Original languageEnglish
Pages (from-to)1081-1085
Number of pages5
JournalJournal of the Korean Physical Society
Volume57
Issue number41
DOIs
Publication statusPublished - 2010 Oct 15

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heat
glass
thin films
humidity
stability tests
magnetron sputtering
degradation
temperature

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Cite this

Kang, J. H., Kim, D. W., Lee, M. H., Lim, Y. S., Seo, W. S., Choi, H-J., ... Lee, D. Y. (2010). Damp heat stability of ZnO:Ga thin films on glass substrate. Journal of the Korean Physical Society, 57(41), 1081-1085. https://doi.org/10.3938/jkps.57.1081
Kang, Jong Ho ; Kim, Dae Wook ; Lee, Myung Hyun ; Lim, Young Soo ; Seo, Won Seon ; Choi, Heon-Jin ; Bang, Jung Sik ; Jang, Hyun Woo ; Lee, Deuk Yong. / Damp heat stability of ZnO:Ga thin films on glass substrate. In: Journal of the Korean Physical Society. 2010 ; Vol. 57, No. 41. pp. 1081-1085.
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abstract = "We investigated the damp heat stability of Ga-doped ZnO (GZO) thin films grown on glass substrates. GZO thin films with thicknesses of 150 nm were grown on glass substrates by rf-magnetron sputtering. After the deposition, a damp heat stability test was performed at various temperature (50 ∼ 65 °C) and relative humidities (80 ∼ 90{\%}) for up to 240 hr. With increasing temperature and humidity, the sheet resistance of the GZO thin films increased to a maximum of 14.2{\%} at 65 °C/90{\%} RH. The changes of surface morphology caused by damp heat were drastic and were comparable to the degradation caused by high temperature only. The effect of damp heat is discussed based on the electrical and the structural characterizations.",
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Kang, JH, Kim, DW, Lee, MH, Lim, YS, Seo, WS, Choi, H-J, Bang, JS, Jang, HW & Lee, DY 2010, 'Damp heat stability of ZnO:Ga thin films on glass substrate', Journal of the Korean Physical Society, vol. 57, no. 41, pp. 1081-1085. https://doi.org/10.3938/jkps.57.1081

Damp heat stability of ZnO:Ga thin films on glass substrate. / Kang, Jong Ho; Kim, Dae Wook; Lee, Myung Hyun; Lim, Young Soo; Seo, Won Seon; Choi, Heon-Jin; Bang, Jung Sik; Jang, Hyun Woo; Lee, Deuk Yong.

In: Journal of the Korean Physical Society, Vol. 57, No. 41, 15.10.2010, p. 1081-1085.

Research output: Contribution to journalArticle

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AU - Lee, Myung Hyun

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