Damp heat stability of ZnO:Ga thin films on glass substrate

Jong Ho Kang, Dae Wook Kim, Myung Hyun Lee, Young Soo Lim, Won Seon Seo, Heon Jin Choi, Jung Sik Bang, Hyun Woo Jang, Deuk Yong Lee

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3 Citations (Scopus)

Abstract

We investigated the damp heat stability of Ga-doped ZnO (GZO) thin films grown on glass substrates. GZO thin films with thicknesses of 150 nm were grown on glass substrates by rf-magnetron sputtering. After the deposition, a damp heat stability test was performed at various temperature (50 ∼ 65 °C) and relative humidities (80 ∼ 90%) for up to 240 hr. With increasing temperature and humidity, the sheet resistance of the GZO thin films increased to a maximum of 14.2% at 65 °C/90% RH. The changes of surface morphology caused by damp heat were drastic and were comparable to the degradation caused by high temperature only. The effect of damp heat is discussed based on the electrical and the structural characterizations.

Original languageEnglish
Pages (from-to)1081-1085
Number of pages5
JournalJournal of the Korean Physical Society
Volume57
Issue number41
DOIs
Publication statusPublished - 2010 Oct 15

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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    Kang, J. H., Kim, D. W., Lee, M. H., Lim, Y. S., Seo, W. S., Choi, H. J., Bang, J. S., Jang, H. W., & Lee, D. Y. (2010). Damp heat stability of ZnO:Ga thin films on glass substrate. Journal of the Korean Physical Society, 57(41), 1081-1085. https://doi.org/10.3938/jkps.57.1081