Degradation of the deposition blocking layer during area-selective plasma-enhanced atomic layer deposition of Cobalt

Han Bo Ram Lee, Jaemin Kim, Hyungjun Kim, Woo Hee Kim, Jeong Won Lee, Inchan Hwang

Research output: Contribution to journalArticle

18 Citations (Scopus)

Abstract

The effects of plasma on the degradation of the deposition blocking layer during area-selective atomic layer deposition were investigated. Co atomic layer deposition (ALD) processes were developed by using Co(iPr-AMD)2 (bis(N,N'-diisopropylacetamidinato)cobalt(II)) as a precursor, and two different reactants, NH3 gas for thermal ALD (TH-ALD) and NH3 plasma for plasma-enhanced ALD (PE-ALD). TH- and PE-ALD were applied to area selective ALD (AS-ALD) by using an octadecyltrichlorosilane (OTS) self-assembled monolayer (SAM) as a blocking layer. Both ALD processes produced pure Co films with resistivities as low as 50 μΩcm. For PE-ALD, however, no selective deposition was achieved due to a degradation of the OTS hydrophobicity caused by the NH3 plasma exposure. The effects of the plasma on the blocking efficiency of SAM were studied.

Original languageEnglish
Pages (from-to)104-107
Number of pages4
JournalJournal of the Korean Physical Society
Volume56
Issue number1
DOIs
Publication statusPublished - 2010 Jan 15

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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