The main problems of the screen printing method are the poor densification and the reaction between the PZT thick films and the Si substrate. For preventing these phenomena, this study adopted hybrid method of screen printing and PZT sol-gel application. PZT(52/48) thick films of 20-40 μm were prepared on Pt/TiO2/YSZ/SiO2/Si substrate. For the sol-gel treated thick films, a remanent polarization of 10.8 to 14.0 μC/cm2, dielectric constant of 517 to 590, and a piezoelectric constant(d33) of 177.0 to 199.9 pC/N were obtained. These results show that the electrical properties of sol-gel treated films is higher than that of only screen printed films. This study shows one of the methods to improve the screen printed thick film's quality and a good solution for the PZT thick film fabrication process on Si-wafer substrate.
|Number of pages||10|
|Publication status||Published - 2001|
|Event||12th Interntional Symposium on Integrated Ferroelectrics - Aachen, Germany|
Duration: 2000 Mar 12 → 2000 Mar 15
Bibliographical noteFunding Information:
The effect of PZT sol application on the PZT(52/48) thick film fabrication using screen printing method was investigated. This method has a merit in taking advantage of the possibility to lower the sintering temperature until about 800-850“ C and improving electrical properties and the adhesion between the thick film and the substrate. Considering other results reported on PZT thick films using screen printing method, this study shows one of the methods to improve the screen printed thick films quality and a good solution for the PZT thick film fabrication problems on Si-wafer Acknowledgement The authors would like to thank D G. Kim and H. G. Kim (Dept of Mat. Sci.& Eng., KAIST) for their sincere helps on the piezoelectric coefficient measurements. They also thanks for the financial support of “the research of the G7 about Micro Machine Research” program (MOCIE/MOST).
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Control and Systems Engineering
- Ceramics and Composites
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry