Densification method of screen printed PZT(52/48) thick films

Yong Bum Kim, Tae Song Kim, Kyo Sook Choi, Doo Jin Choi

Research output: Contribution to journalConference article

10 Citations (Scopus)

Abstract

The main problems of the screen printing method are the poor densification and the reaction between the PZT thick films and the Si substrate. For preventing these phenomena, this study adopted hybrid method of screen printing and PZT sol-gel application. PZT(52/48) thick films of 20-40 μm were prepared on Pt/TiO 2 /YSZ/SiO 2 /Si substrate. For the sol-gel treated thick films, a remanent polarization of 10.8 to 14.0 μC/cm 2 , dielectric constant of 517 to 590, and a piezoelectric constant(d 33 ) of 177.0 to 199.9 pC/N were obtained. These results show that the electrical properties of sol-gel treated films is higher than that of only screen printed films. This study shows one of the methods to improve the screen printed thick film's quality and a good solution for the PZT thick film fabrication process on Si-wafer substrate.

Original languageEnglish
JournalIntegrated Ferroelectrics
Volume35
Issue number1-4
Publication statusPublished - 2001 May 9
Event12th Interntional Symposium on Integrated Ferroelectrics - Aachen, Germany
Duration: 2000 Mar 122000 Mar 15

Fingerprint

densification
Densification
Thick films
thick films
Sol-gels
Screen printing
gels
printing
Substrates
Remanence
yttria-stabilized zirconia
Electric properties
Permittivity
electrical properties
wafers
permittivity
Fabrication
fabrication
polarization

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Control and Systems Engineering
  • Ceramics and Composites
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

Kim, Yong Bum ; Kim, Tae Song ; Choi, Kyo Sook ; Choi, Doo Jin. / Densification method of screen printed PZT(52/48) thick films. In: Integrated Ferroelectrics. 2001 ; Vol. 35, No. 1-4.
@article{ef33188d165a453bb33fbe34baebe2d0,
title = "Densification method of screen printed PZT(52/48) thick films",
abstract = "The main problems of the screen printing method are the poor densification and the reaction between the PZT thick films and the Si substrate. For preventing these phenomena, this study adopted hybrid method of screen printing and PZT sol-gel application. PZT(52/48) thick films of 20-40 μm were prepared on Pt/TiO 2 /YSZ/SiO 2 /Si substrate. For the sol-gel treated thick films, a remanent polarization of 10.8 to 14.0 μC/cm 2 , dielectric constant of 517 to 590, and a piezoelectric constant(d 33 ) of 177.0 to 199.9 pC/N were obtained. These results show that the electrical properties of sol-gel treated films is higher than that of only screen printed films. This study shows one of the methods to improve the screen printed thick film's quality and a good solution for the PZT thick film fabrication process on Si-wafer substrate.",
author = "Kim, {Yong Bum} and Kim, {Tae Song} and Choi, {Kyo Sook} and Choi, {Doo Jin}",
year = "2001",
month = "5",
day = "9",
language = "English",
volume = "35",
journal = "Integrated Ferroelectrics",
issn = "1058-4587",
publisher = "Taylor and Francis Ltd.",
number = "1-4",

}

Densification method of screen printed PZT(52/48) thick films. / Kim, Yong Bum; Kim, Tae Song; Choi, Kyo Sook; Choi, Doo Jin.

In: Integrated Ferroelectrics, Vol. 35, No. 1-4, 09.05.2001.

Research output: Contribution to journalConference article

TY - JOUR

T1 - Densification method of screen printed PZT(52/48) thick films

AU - Kim, Yong Bum

AU - Kim, Tae Song

AU - Choi, Kyo Sook

AU - Choi, Doo Jin

PY - 2001/5/9

Y1 - 2001/5/9

N2 - The main problems of the screen printing method are the poor densification and the reaction between the PZT thick films and the Si substrate. For preventing these phenomena, this study adopted hybrid method of screen printing and PZT sol-gel application. PZT(52/48) thick films of 20-40 μm were prepared on Pt/TiO 2 /YSZ/SiO 2 /Si substrate. For the sol-gel treated thick films, a remanent polarization of 10.8 to 14.0 μC/cm 2 , dielectric constant of 517 to 590, and a piezoelectric constant(d 33 ) of 177.0 to 199.9 pC/N were obtained. These results show that the electrical properties of sol-gel treated films is higher than that of only screen printed films. This study shows one of the methods to improve the screen printed thick film's quality and a good solution for the PZT thick film fabrication process on Si-wafer substrate.

AB - The main problems of the screen printing method are the poor densification and the reaction between the PZT thick films and the Si substrate. For preventing these phenomena, this study adopted hybrid method of screen printing and PZT sol-gel application. PZT(52/48) thick films of 20-40 μm were prepared on Pt/TiO 2 /YSZ/SiO 2 /Si substrate. For the sol-gel treated thick films, a remanent polarization of 10.8 to 14.0 μC/cm 2 , dielectric constant of 517 to 590, and a piezoelectric constant(d 33 ) of 177.0 to 199.9 pC/N were obtained. These results show that the electrical properties of sol-gel treated films is higher than that of only screen printed films. This study shows one of the methods to improve the screen printed thick film's quality and a good solution for the PZT thick film fabrication process on Si-wafer substrate.

UR - http://www.scopus.com/inward/record.url?scp=0035041689&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0035041689&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0035041689

VL - 35

JO - Integrated Ferroelectrics

JF - Integrated Ferroelectrics

SN - 1058-4587

IS - 1-4

ER -