Dependence of processing parameters on structural properties and microstructures of pulsed laser deposited LiMn2O4 thin films

Dong Wook Shin, Ravindra K. Gupta, Won Kook Choi, Yong Soo Cho, Seok Jin Yoon, Ji Won Choi

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

LiMn2O4 thin films grown on a Pt/Ti/SiO 2/Si(100) substrate by pulsed laser deposition were studied with focusing on the effects of growth parameters on crystallographic and structural characteristics. The growth parameters, namely oxygen pressure, target-substrate distance, laser energy density, pulse frequency and substrate temperature were established in a sequential manner to obtain smooth, dense and single-phase LiMn2O4 films. The smooth, dense LiMn2O 4 single-phase thin films were found to show the improved cycle performance of cathode of thin film battery.

Original languageEnglish
Article number075501
JournalJapanese journal of applied physics
Volume48
Issue number7 PART 1
DOIs
Publication statusPublished - 2009 Jul

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Fingerprint Dive into the research topics of 'Dependence of processing parameters on structural properties and microstructures of pulsed laser deposited LiMn<sub>2</sub>O<sub>4</sub> thin films'. Together they form a unique fingerprint.

  • Cite this