Abstract
The parylene-A is a polymer of p-xylene with primary amine groups, and it is polymerized by pyrolysis of the functionalized parylene dimer with primary amine groups. The functionalized parylene-A film was used for the biosensor applications to immobilize proteins, and it requires a quite thin film with a thickness less than 100 nm. The conventional methods to control the thickness of parylene films by 1) adjusting the amount of parylene dimer and 2) setting the deposition time were observed to result in a large deviation from the targeted thickness at the thickness range of 0 - 100 nm, and the film thickness from the repeated deposition under the same condition showed quite a poor reproducibility. In this work, an on-line monitoring method of parylene-A film thickness was presented by installing a quartz crystal microbalance (QCM) sensor at the deposition chamber. And then, the parylene-A films were prepared by using the on-line monitoring method based on the QCM sensor. From the comparison of control parameters such as the linearity as well as reproducibility with the conventional methods, the QCM monitoring was proved to be feasible for the deposition of a thin film with a thickness less than 100 nm.
| Original language | English |
|---|---|
| Pages (from-to) | 1021-1022 |
| Number of pages | 2 |
| Journal | Procedia Engineering |
| Volume | 47 |
| DOIs | |
| Publication status | Published - 2012 Jan 1 |
| Event | 26th European Conference on Solid-State Transducers, EUROSENSOR 2012 - Krakow, Poland Duration: 2012 Sep 9 → 2012 Sep 12 |
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All Science Journal Classification (ASJC) codes
- Engineering(all)
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Deposition control of parylene-a film with quartz crystal microbalance (QCM). / Lee, Ga Yeon; Ko, Hyuk; Choi, Yong Hwan; Pyun, Jae Chul.
In: Procedia Engineering, Vol. 47, 01.01.2012, p. 1021-1022.Research output: Contribution to journal › Conference article
TY - JOUR
T1 - Deposition control of parylene-a film with quartz crystal microbalance (QCM)
AU - Lee, Ga Yeon
AU - Ko, Hyuk
AU - Choi, Yong Hwan
AU - Pyun, Jae Chul
PY - 2012/1/1
Y1 - 2012/1/1
N2 - The parylene-A is a polymer of p-xylene with primary amine groups, and it is polymerized by pyrolysis of the functionalized parylene dimer with primary amine groups. The functionalized parylene-A film was used for the biosensor applications to immobilize proteins, and it requires a quite thin film with a thickness less than 100 nm. The conventional methods to control the thickness of parylene films by 1) adjusting the amount of parylene dimer and 2) setting the deposition time were observed to result in a large deviation from the targeted thickness at the thickness range of 0 - 100 nm, and the film thickness from the repeated deposition under the same condition showed quite a poor reproducibility. In this work, an on-line monitoring method of parylene-A film thickness was presented by installing a quartz crystal microbalance (QCM) sensor at the deposition chamber. And then, the parylene-A films were prepared by using the on-line monitoring method based on the QCM sensor. From the comparison of control parameters such as the linearity as well as reproducibility with the conventional methods, the QCM monitoring was proved to be feasible for the deposition of a thin film with a thickness less than 100 nm.
AB - The parylene-A is a polymer of p-xylene with primary amine groups, and it is polymerized by pyrolysis of the functionalized parylene dimer with primary amine groups. The functionalized parylene-A film was used for the biosensor applications to immobilize proteins, and it requires a quite thin film with a thickness less than 100 nm. The conventional methods to control the thickness of parylene films by 1) adjusting the amount of parylene dimer and 2) setting the deposition time were observed to result in a large deviation from the targeted thickness at the thickness range of 0 - 100 nm, and the film thickness from the repeated deposition under the same condition showed quite a poor reproducibility. In this work, an on-line monitoring method of parylene-A film thickness was presented by installing a quartz crystal microbalance (QCM) sensor at the deposition chamber. And then, the parylene-A films were prepared by using the on-line monitoring method based on the QCM sensor. From the comparison of control parameters such as the linearity as well as reproducibility with the conventional methods, the QCM monitoring was proved to be feasible for the deposition of a thin film with a thickness less than 100 nm.
UR - http://www.scopus.com/inward/record.url?scp=84891675354&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84891675354&partnerID=8YFLogxK
U2 - 10.1016/j.proeng.2012.09.321
DO - 10.1016/j.proeng.2012.09.321
M3 - Conference article
AN - SCOPUS:84891675354
VL - 47
SP - 1021
EP - 1022
JO - Procedia Engineering
JF - Procedia Engineering
SN - 1877-7058
ER -