Design and characterization of low-loss and low-dispersion micromachined elevated CPW

Research output: Contribution to journalArticle

Abstract

In this paper, the performance of a 10-μm-elevated low-loss and low-dispersion elevated coplanar waveguide (ECPW) is presented. It is shown that a wide range of characteristic impedances, encompassing the 40-100Ω range, is obtainable. A very low effective dielectric constant (close to 1) is predicted based on the 3D finite-difference time-domain (FDTD) method and confirmed by measurement. The overlapped configuration on standard silicon reveals the best performance, with a loss of about 0.2 dB/mm, which is much lower than that of a conventional CPW at 40 GHz.

Original languageEnglish
Pages (from-to)169-171
Number of pages3
JournalMicrowave and Optical Technology Letters
Volume39
Issue number3
DOIs
Publication statusPublished - 2003 Nov 5

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Design and characterization of low-loss and low-dispersion micromachined elevated CPW'. Together they form a unique fingerprint.

  • Cite this