Design and characterization of low-loss and low-dispersion micromachined elevated CPW

Research output: Contribution to journalArticle

Abstract

In this paper, the performance of a 10-μm-elevated low-loss and low-dispersion elevated coplanar waveguide (ECPW) is presented. It is shown that a wide range of characteristic impedances, encompassing the 40-100Ω range, is obtainable. A very low effective dielectric constant (close to 1) is predicted based on the 3D finite-difference time-domain (FDTD) method and confirmed by measurement. The overlapped configuration on standard silicon reveals the best performance, with a loss of about 0.2 dB/mm, which is much lower than that of a conventional CPW at 40 GHz.

Original languageEnglish
Pages (from-to)169-171
Number of pages3
JournalMicrowave and Optical Technology Letters
Volume39
Issue number3
DOIs
Publication statusPublished - 2003 Nov 5

Fingerprint

Coplanar waveguides
Finite difference time domain method
Silicon
finite difference time domain method
Permittivity
impedance
permittivity
waveguides
silicon
configurations

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

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title = "Design and characterization of low-loss and low-dispersion micromachined elevated CPW",
abstract = "In this paper, the performance of a 10-μm-elevated low-loss and low-dispersion elevated coplanar waveguide (ECPW) is presented. It is shown that a wide range of characteristic impedances, encompassing the 40-100Ω range, is obtainable. A very low effective dielectric constant (close to 1) is predicted based on the 3D finite-difference time-domain (FDTD) method and confirmed by measurement. The overlapped configuration on standard silicon reveals the best performance, with a loss of about 0.2 dB/mm, which is much lower than that of a conventional CPW at 40 GHz.",
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Design and characterization of low-loss and low-dispersion micromachined elevated CPW. / Lee, Sang No; Kim, Yong Jun; Yook, Jong Gwan.

In: Microwave and Optical Technology Letters, Vol. 39, No. 3, 05.11.2003, p. 169-171.

Research output: Contribution to journalArticle

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