Design and fabrication of perpendicular patterned magnetic media using nanoimprinted nano pillar patterns

Jeongwon Han, Jung Mo Yang, Sang Chul Shin, Young Joo Kim, Shinill Kang

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Perpendicular patterned magnetic media have been regarded as a one of candidate to achieve an ultrahigh density magnetic data starage media of over 1 Tb/in2. One approach to producing patterned magnetic media is deposition of thin magnetic films on pre-etched nano pillar array prepared with nanoimprinting technology. In this paper, we have investigated the feasibility of the polymeric nano pillar patterns on glass substrate, which were replicated by UV nanoimprinting process with the polymeric nanostamp, and magnetic layer deposition technology without additional etching process to fabrication for perpendicular patterned magnetic media. The polymeric nano pillar patterns were replicated by 2-step UV nanoimprinting process by using a silicon nanomaster with nano pillar patterns. We deposited magnetic layers on the nanoimprinted nano pillar patterns to make the perpendicular patterned magnetic media. Finally, we show that the fabricated magnetic media could be used for perpendicular patterned magnetic media by measurement of magnetic characteristics.

Original languageEnglish
Article number4816014
Pages (from-to)2288-2291
Number of pages4
JournalIEEE Transactions on Magnetics
Volume45
Issue number5
DOIs
Publication statusPublished - 2009 May 1

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Magnetic thin films
Fabrication
Silicon
Etching
Glass
Substrates

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this

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abstract = "Perpendicular patterned magnetic media have been regarded as a one of candidate to achieve an ultrahigh density magnetic data starage media of over 1 Tb/in2. One approach to producing patterned magnetic media is deposition of thin magnetic films on pre-etched nano pillar array prepared with nanoimprinting technology. In this paper, we have investigated the feasibility of the polymeric nano pillar patterns on glass substrate, which were replicated by UV nanoimprinting process with the polymeric nanostamp, and magnetic layer deposition technology without additional etching process to fabrication for perpendicular patterned magnetic media. The polymeric nano pillar patterns were replicated by 2-step UV nanoimprinting process by using a silicon nanomaster with nano pillar patterns. We deposited magnetic layers on the nanoimprinted nano pillar patterns to make the perpendicular patterned magnetic media. Finally, we show that the fabricated magnetic media could be used for perpendicular patterned magnetic media by measurement of magnetic characteristics.",
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Design and fabrication of perpendicular patterned magnetic media using nanoimprinted nano pillar patterns. / Han, Jeongwon; Yang, Jung Mo; Shin, Sang Chul; Kim, Young Joo; Kang, Shinill.

In: IEEE Transactions on Magnetics, Vol. 45, No. 5, 4816014, 01.05.2009, p. 2288-2291.

Research output: Contribution to journalArticle

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