Perpendicular patterned magnetic media have been regarded as a one of candidate to achieve an ultrahigh density magnetic data starage media of over 1 Tb/in2. One approach to producing patterned magnetic media is deposition of thin magnetic films on pre-etched nano pillar array prepared with nanoimprinting technology. In this paper, we have investigated the feasibility of the polymeric nano pillar patterns on glass substrate, which were replicated by UV nanoimprinting process with the polymeric nanostamp, and magnetic layer deposition technology without additional etching process to fabrication for perpendicular patterned magnetic media. The polymeric nano pillar patterns were replicated by 2-step UV nanoimprinting process by using a silicon nanomaster with nano pillar patterns. We deposited magnetic layers on the nanoimprinted nano pillar patterns to make the perpendicular patterned magnetic media. Finally, we show that the fabricated magnetic media could be used for perpendicular patterned magnetic media by measurement of magnetic characteristics.
Bibliographical noteFunding Information:
This work was supported by a grant (M102KN010005-08K1401-00510) from the Center for Nanoscale Mechatronics & Manufacturing, one of the 21st Century Frontier Research Programs, which are supported by Ministry of Science and Technology, Korea.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering