Design and fabrication of tungsten carbide mould with micro patterns imprinted by micro lithography

Woojae Choi, Jayong Lee, Wook Bae Kim, Byung Kwon Min, Shinill Kang, Sang Jo Lee

Research output: Contribution to journalArticle

23 Citations (Scopus)

Abstract

Core fabrication is one of the key technologies of glass moulding process used in micro optical component manufacturing. However, when the cavity size is very small and an array-type cavity is needed, a conventional diamond turning process cannot be employed. In this study, a novel core fabrication method that can be used for glass micro optical components has been developed. First, microlens array (with individual lens diameters of 36-300 μm) mould masters were produced with silicon using a photoresist reflow and a reactive ion etching process. Then, the shape of the silicon lens masters was transferred to tungsten carbide cores using a powder pressure forming and a sintering process. To further improve the surface qualities, magnetic abrasive finishing was carried out. The details of the fabrication process are presented in this paper. The characteristics of the proposed method, such as the shrinkage in the sintering process and the effects of grain size of the tungsten carbide powder and abrasive finishing process on the surface qualities, were also discussed.

Original languageEnglish
Pages (from-to)1519-1525
Number of pages7
JournalJournal of Micromechanics and Microengineering
Volume14
Issue number11
DOIs
Publication statusPublished - 2004 Nov 1

Fingerprint

Tungsten carbide
Lithography
Silicon
Abrasives
Fabrication
Powders
Surface properties
Lenses
Sintering
Glass
Diamond
Reactive ion etching
Photoresists
Molding
Diamonds
tungsten carbide

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

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abstract = "Core fabrication is one of the key technologies of glass moulding process used in micro optical component manufacturing. However, when the cavity size is very small and an array-type cavity is needed, a conventional diamond turning process cannot be employed. In this study, a novel core fabrication method that can be used for glass micro optical components has been developed. First, microlens array (with individual lens diameters of 36-300 μm) mould masters were produced with silicon using a photoresist reflow and a reactive ion etching process. Then, the shape of the silicon lens masters was transferred to tungsten carbide cores using a powder pressure forming and a sintering process. To further improve the surface qualities, magnetic abrasive finishing was carried out. The details of the fabrication process are presented in this paper. The characteristics of the proposed method, such as the shrinkage in the sintering process and the effects of grain size of the tungsten carbide powder and abrasive finishing process on the surface qualities, were also discussed.",
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Design and fabrication of tungsten carbide mould with micro patterns imprinted by micro lithography. / Choi, Woojae; Lee, Jayong; Kim, Wook Bae; Min, Byung Kwon; Kang, Shinill; Lee, Sang Jo.

In: Journal of Micromechanics and Microengineering, Vol. 14, No. 11, 01.11.2004, p. 1519-1525.

Research output: Contribution to journalArticle

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AU - Kang, Shinill

AU - Lee, Sang Jo

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