Abstract
Microactuators for micromirror system have found many applications in various areas including projection displays, optical switches, RF switches and so on. In this paper we demonstrated micromirror actuator using ionic polymer metal composites (IPMC) that is a suitable candidate, since it has many attractive qualities such as durability, aquatic, miniature and light-weighted. Specially, IPMC has extraordinary advantages which are simple bending motion for low driving voltage (1-2 V), low power consumption, and simple structure. The IPMC actuator is made of Nafion NE-1110 (Dupont Co, Ltd., 260 μm thick) layer and electrode (platinum) layers and driven by 1-4 V. The displacement measured vertically is 0.25 mm and tilting angle is 11.3°. The angular motion, which is more than 10°, is a good advantage in the field of display module. This paper shows that the IPMC actuator has enough possibility for other applications.
| Original language | English |
|---|---|
| Pages (from-to) | 1531-1538 |
| Number of pages | 8 |
| Journal | Microsystem Technologies |
| Volume | 15 |
| Issue number | 10-11 |
| DOIs | |
| Publication status | Published - 2009 Oct |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Hardware and Architecture
- Electrical and Electronic Engineering