Detection of hydrogen and NOx gases based on a thermoelectric gas sensor with an embedded tin oxide catalyst

Seung Il Yoon, Chung Il Lee, Yong Jun Kim

Research output: Contribution to journalArticle

Abstract

In this paper, we report a micromachined thermoelectric gas sensor with an embedded catalyst that can be used for gas sensing applications. The proposed sensor can detect the target gas by measuring heat from the catalytic reaction on the surface of the catalyst, tin oxide in this case. By using the thermoelectric effect, decreased response and recovery times can be obtained. To increase the sensitivity of the sensor, the thermal components of the proposed gas sensor are fabricated on a high-thermal-resistivity layer, SU-8 in this case, which led to the reduction in the rate of parasitic heat transfer to the substrate. In order to verify the thermal characteristic of the fabricated sensor, the intensity of output signals depending on the temperature differences between the hot and cold junctions was measured. The sensor response to the temperature change was 4.61 V/W. Hydrogen and NOx gases were detected by the proposed sensor. The change in output signal intensity depending on hydrogen gas concentration was 1.06×10-1 μV/ppm, and the change in output signal intensity depending on NOx gas concentration was 1.50×10-1 μV/ppm.

Original languageEnglish
Pages (from-to)121-134
Number of pages14
JournalSensors and Materials
Volume22
Issue number3
Publication statusPublished - 2010 Jun 4

Fingerprint

Tin oxides
Chemical sensors
tin oxides
Hydrogen
Gases
catalysts
Catalysts
sensors
Sensors
hydrogen
gases
Thermoelectricity
output
Thermal conductivity
stannic oxide
Heat transfer
Recovery
Temperature
temperature gradients
heat transfer

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Materials Science(all)

Cite this

@article{8c6c801018b9400fbd8af6728d6f732b,
title = "Detection of hydrogen and NOx gases based on a thermoelectric gas sensor with an embedded tin oxide catalyst",
abstract = "In this paper, we report a micromachined thermoelectric gas sensor with an embedded catalyst that can be used for gas sensing applications. The proposed sensor can detect the target gas by measuring heat from the catalytic reaction on the surface of the catalyst, tin oxide in this case. By using the thermoelectric effect, decreased response and recovery times can be obtained. To increase the sensitivity of the sensor, the thermal components of the proposed gas sensor are fabricated on a high-thermal-resistivity layer, SU-8 in this case, which led to the reduction in the rate of parasitic heat transfer to the substrate. In order to verify the thermal characteristic of the fabricated sensor, the intensity of output signals depending on the temperature differences between the hot and cold junctions was measured. The sensor response to the temperature change was 4.61 V/W. Hydrogen and NOx gases were detected by the proposed sensor. The change in output signal intensity depending on hydrogen gas concentration was 1.06×10-1 μV/ppm, and the change in output signal intensity depending on NOx gas concentration was 1.50×10-1 μV/ppm.",
author = "Yoon, {Seung Il} and Lee, {Chung Il} and Kim, {Yong Jun}",
year = "2010",
month = "6",
day = "4",
language = "English",
volume = "22",
pages = "121--134",
journal = "Sensors and Materials",
issn = "0914-4935",
publisher = "M Y U Scientific Publishing Division",
number = "3",

}

Detection of hydrogen and NOx gases based on a thermoelectric gas sensor with an embedded tin oxide catalyst. / Yoon, Seung Il; Lee, Chung Il; Kim, Yong Jun.

In: Sensors and Materials, Vol. 22, No. 3, 04.06.2010, p. 121-134.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Detection of hydrogen and NOx gases based on a thermoelectric gas sensor with an embedded tin oxide catalyst

AU - Yoon, Seung Il

AU - Lee, Chung Il

AU - Kim, Yong Jun

PY - 2010/6/4

Y1 - 2010/6/4

N2 - In this paper, we report a micromachined thermoelectric gas sensor with an embedded catalyst that can be used for gas sensing applications. The proposed sensor can detect the target gas by measuring heat from the catalytic reaction on the surface of the catalyst, tin oxide in this case. By using the thermoelectric effect, decreased response and recovery times can be obtained. To increase the sensitivity of the sensor, the thermal components of the proposed gas sensor are fabricated on a high-thermal-resistivity layer, SU-8 in this case, which led to the reduction in the rate of parasitic heat transfer to the substrate. In order to verify the thermal characteristic of the fabricated sensor, the intensity of output signals depending on the temperature differences between the hot and cold junctions was measured. The sensor response to the temperature change was 4.61 V/W. Hydrogen and NOx gases were detected by the proposed sensor. The change in output signal intensity depending on hydrogen gas concentration was 1.06×10-1 μV/ppm, and the change in output signal intensity depending on NOx gas concentration was 1.50×10-1 μV/ppm.

AB - In this paper, we report a micromachined thermoelectric gas sensor with an embedded catalyst that can be used for gas sensing applications. The proposed sensor can detect the target gas by measuring heat from the catalytic reaction on the surface of the catalyst, tin oxide in this case. By using the thermoelectric effect, decreased response and recovery times can be obtained. To increase the sensitivity of the sensor, the thermal components of the proposed gas sensor are fabricated on a high-thermal-resistivity layer, SU-8 in this case, which led to the reduction in the rate of parasitic heat transfer to the substrate. In order to verify the thermal characteristic of the fabricated sensor, the intensity of output signals depending on the temperature differences between the hot and cold junctions was measured. The sensor response to the temperature change was 4.61 V/W. Hydrogen and NOx gases were detected by the proposed sensor. The change in output signal intensity depending on hydrogen gas concentration was 1.06×10-1 μV/ppm, and the change in output signal intensity depending on NOx gas concentration was 1.50×10-1 μV/ppm.

UR - http://www.scopus.com/inward/record.url?scp=77952924591&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77952924591&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:77952924591

VL - 22

SP - 121

EP - 134

JO - Sensors and Materials

JF - Sensors and Materials

SN - 0914-4935

IS - 3

ER -