Determination of elastic modulus and Poisson's ratio of diamond-like carbon films

Sung Jin Cho, Kwang Ryeol Lee, Kwang Yong Eun, Jun Hee Hahn, Dae Hong Ko

Research output: Contribution to journalConference article

74 Citations (Scopus)

Abstract

A simple technique to measure the elastic modulus and Poisson's ratio of diamond-like carbon (DLC) films deposited on Si substrate was suggested. This technique involved etching a side of Si substrate using the DLC film as an etching mask. The edge of the DLC overhang, which is free from constraint of the Si substrate, exhibits periodic sinusoidal shape. By measuring the amplitude and the wavelength of the sinusoidal edge, we can determine the strain of the film required to adhere to the substrate. Combined with an independent stress measurement by laser reflection method this technique allows calculation of the biaxial elastic modulus, E/(1 - ν) where E is the elastic modulus and ν Poisson's ratio of the DLC films. By comparing the biaxial elastic modulus with plane-strain modulus E/(1 - ν2) measured by nanoindentation, we could further determine the elastic modulus and Poisson's ratio, independently. The mechanical properties of DLC films deposited by r.f. PACVD were characterized using this technique. The films were prepared by using C6H6 r.f. glow discharge at a self bias voltage of 400 V and a deposition pressure of 1.33 Pa. The elastic modulus and Poisson's ratio were 87 ± 18 GPa and 0.22 ± 0.33, respectively. The effects of the etching depth and the film thickness were also discussed.

Original languageEnglish
Pages (from-to)207-210
Number of pages4
JournalThin Solid Films
Volume341
Issue number1
DOIs
Publication statusPublished - 1999 Mar 12

Fingerprint

Diamond like carbon films
Poisson ratio
modulus of elasticity
Elastic moduli
diamonds
carbon
Etching
etching
Substrates
Diamond
stress measurement
Stress measurement
plane strain
Glow discharges
Nanoindentation
Bias voltage
nanoindentation
glow discharges
Film thickness
Masks

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

Cho, Sung Jin ; Lee, Kwang Ryeol ; Yong Eun, Kwang ; Hee Hahn, Jun ; Ko, Dae Hong. / Determination of elastic modulus and Poisson's ratio of diamond-like carbon films. In: Thin Solid Films. 1999 ; Vol. 341, No. 1. pp. 207-210.
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Determination of elastic modulus and Poisson's ratio of diamond-like carbon films. / Cho, Sung Jin; Lee, Kwang Ryeol; Yong Eun, Kwang; Hee Hahn, Jun; Ko, Dae Hong.

In: Thin Solid Films, Vol. 341, No. 1, 12.03.1999, p. 207-210.

Research output: Contribution to journalConference article

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AU - Yong Eun, Kwang

AU - Hee Hahn, Jun

AU - Ko, Dae Hong

PY - 1999/3/12

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