Abstract
A simple technique to measure the elastic modulus and Poisson's ratio of diamond-like carbon (DLC) films deposited on Si substrate was suggested. This technique involved etching a side of Si substrate using the DLC film as an etching mask. The edge of the DLC overhang, which is free from constraint of the Si substrate, exhibits periodic sinusoidal shape. By measuring the amplitude and the wavelength of the sinusoidal edge, we can determine the strain of the film required to adhere to the substrate. Combined with an independent stress measurement by laser reflection method this technique allows calculation of the biaxial elastic modulus, E/(1 - ν) where E is the elastic modulus and ν Poisson's ratio of the DLC films. By comparing the biaxial elastic modulus with plane-strain modulus E/(1 - ν2) measured by nanoindentation, we could further determine the elastic modulus and Poisson's ratio, independently. The mechanical properties of DLC films deposited by r.f. PACVD were characterized using this technique. The films were prepared by using C6H6 r.f. glow discharge at a self bias voltage of 400 V and a deposition pressure of 1.33 Pa. The elastic modulus and Poisson's ratio were 87 ± 18 GPa and 0.22 ± 0.33, respectively. The effects of the etching depth and the film thickness were also discussed.
| Original language | English |
|---|---|
| Pages (from-to) | 207-210 |
| Number of pages | 4 |
| Journal | Thin Solid Films |
| Volume | 341 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 1999 Mar 12 |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry
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Determination of elastic modulus and Poisson's ratio of diamond-like carbon films. / Cho, Sung Jin; Lee, Kwang Ryeol; Yong Eun, Kwang; Hee Hahn, Jun; Ko, Dae Hong.
In: Thin Solid Films, Vol. 341, No. 1, 12.03.1999, p. 207-210.Research output: Contribution to journal › Conference article
TY - JOUR
T1 - Determination of elastic modulus and Poisson's ratio of diamond-like carbon films
AU - Cho, Sung Jin
AU - Lee, Kwang Ryeol
AU - Yong Eun, Kwang
AU - Hee Hahn, Jun
AU - Ko, Dae Hong
PY - 1999/3/12
Y1 - 1999/3/12
N2 - A simple technique to measure the elastic modulus and Poisson's ratio of diamond-like carbon (DLC) films deposited on Si substrate was suggested. This technique involved etching a side of Si substrate using the DLC film as an etching mask. The edge of the DLC overhang, which is free from constraint of the Si substrate, exhibits periodic sinusoidal shape. By measuring the amplitude and the wavelength of the sinusoidal edge, we can determine the strain of the film required to adhere to the substrate. Combined with an independent stress measurement by laser reflection method this technique allows calculation of the biaxial elastic modulus, E/(1 - ν) where E is the elastic modulus and ν Poisson's ratio of the DLC films. By comparing the biaxial elastic modulus with plane-strain modulus E/(1 - ν2) measured by nanoindentation, we could further determine the elastic modulus and Poisson's ratio, independently. The mechanical properties of DLC films deposited by r.f. PACVD were characterized using this technique. The films were prepared by using C6H6 r.f. glow discharge at a self bias voltage of 400 V and a deposition pressure of 1.33 Pa. The elastic modulus and Poisson's ratio were 87 ± 18 GPa and 0.22 ± 0.33, respectively. The effects of the etching depth and the film thickness were also discussed.
AB - A simple technique to measure the elastic modulus and Poisson's ratio of diamond-like carbon (DLC) films deposited on Si substrate was suggested. This technique involved etching a side of Si substrate using the DLC film as an etching mask. The edge of the DLC overhang, which is free from constraint of the Si substrate, exhibits periodic sinusoidal shape. By measuring the amplitude and the wavelength of the sinusoidal edge, we can determine the strain of the film required to adhere to the substrate. Combined with an independent stress measurement by laser reflection method this technique allows calculation of the biaxial elastic modulus, E/(1 - ν) where E is the elastic modulus and ν Poisson's ratio of the DLC films. By comparing the biaxial elastic modulus with plane-strain modulus E/(1 - ν2) measured by nanoindentation, we could further determine the elastic modulus and Poisson's ratio, independently. The mechanical properties of DLC films deposited by r.f. PACVD were characterized using this technique. The films were prepared by using C6H6 r.f. glow discharge at a self bias voltage of 400 V and a deposition pressure of 1.33 Pa. The elastic modulus and Poisson's ratio were 87 ± 18 GPa and 0.22 ± 0.33, respectively. The effects of the etching depth and the film thickness were also discussed.
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U2 - 10.1016/S0040-6090(98)01512-0
DO - 10.1016/S0040-6090(98)01512-0
M3 - Conference article
VL - 341
SP - 207
EP - 210
JO - Thin Solid Films
JF - Thin Solid Films
SN - 0040-6090
IS - 1
ER -