Abstract
In this paper, we report the development of an optical sensor network (OSN) based on piezoelectrically actuated corner cube retroreflectors (PA-CCRs). PA-CCRs were fabricated by microelectromechanical systems processes and assembled by aligning horizontally actuated mirrors and vertical side walls in a holder, which allows mass production. Fabricated PA-CCRs showed a tilting angle by more than 1.5 deg at 5 V bias voltage. A 3 dB cutoff frequency was measured to be in the range of 3.5 kHz. To show the feasilbility, an OSN was established based on fabricated PA-CCRs for on-off keying passive transmission links. The results demonstrated data transmission at a rate up to 5 kb/s.
Original language | English |
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Pages (from-to) | 2315-2321 |
Number of pages | 7 |
Journal | Applied Optics |
Volume | 51 |
Issue number | 13 |
DOIs | |
Publication status | Published - 2012 May 1 |
All Science Journal Classification (ASJC) codes
- Atomic and Molecular Physics, and Optics
- Engineering (miscellaneous)
- Electrical and Electronic Engineering