Development of 3-axis nano stage for precision positioning in lithography system

Dong Ju Lee, Kang Nyung Lee, No Cheol Park, Young Pil Park, Hyuk Kim, Suk Won Lee, Hyoung Gil Choi, Moon Gu Lee, Jiho Uh, Jung Woo Park, Yong Hwan Choi, Dong Jin Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

15 Citations (Scopus)

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Engineering & Materials Science