This paper reports a highly stretchable strain sensor consisting of patterned and rolled carbon nanotubes (CNTs) embedded in an elastomer. To form overlapped lines of CNTs on the elastomer, vertically aligned CNTs (VACNTs) are grown on the patterned catalytic sites and rolled out by a roller. In the initial unloaded state, these lines of CNTs are overlapped with each other. Under loading, the flexible substrate is extended, and the overlapped CNT lines are slid and separated, increasing the electrical resistance. The fabricated sensor showed excellent sensing performances including broad sensing range (>500% strain), high sensitivity (gauge factor >28), high repeatability, and durability. In addition, since the shape of the CNT lines determines the resistance through the deformed lines of CNTs under applied strain, the performance of the sensor can be further improved by optimizing the pattern design. Therefore, the sensor would be an attractive candidate for diverse applications of strain sensors.
|Title of host publication||2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019|
|Publisher||Institute of Electrical and Electronics Engineers Inc.|
|Number of pages||4|
|Publication status||Published - 2019 Jan|
|Event||32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of|
Duration: 2019 Jan 27 → 2019 Jan 31
|Name||Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)|
|Conference||32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019|
|Country/Territory||Korea, Republic of|
|Period||19/1/27 → 19/1/31|
Bibliographical noteFunding Information:
This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korea government (MSIT) (No. NRF-2018R1A2A1A05023070) and (MSIT) (2018R1A4A1025986).
This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korea government (MSIT) (No. NRF-2018R1A2A1A05023070)
© 2019 IEEE.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering