Development of carbon nanotubes contact-based linear displacement sensor with large sensing range

Jae Ik Lee, Jungwook Choi, Kyounghoon Lee, Bongwon Jeong, Jongbaeg Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

A novel displacement sensor based on contact area change of two sets of vertically aligned carbon nanotubes (VACNTs) is developed. The VACNTs synthesized on movable side of two facing microstructures are in contact with another set of VACNTs on fixed side. When the movable microstructure is displaced, the VACNTs on movable side slide on those of fixed side. The measured output current signal is linear to the displacement input to the sensor. Experimentally verified sensing range is over 2 mm, and it could be easily extended or reduced by varying the overlapped length of CNTs. By monitoring two signals from two sets of facing VACNTs, it is possible to simultaneously measure both the displacement and the direction of motion. It also enables the significant reduction of possible measurement errors from the temperature fluctuation.

Original languageEnglish
Title of host publicationMEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
Pages627-630
Number of pages4
DOIs
Publication statusPublished - 2010 Jun 1
Event23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong, China
Duration: 2010 Jan 242010 Jan 28

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
CountryChina
CityHong Kong
Period10/1/2410/1/28

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Development of carbon nanotubes contact-based linear displacement sensor with large sensing range'. Together they form a unique fingerprint.

  • Cite this

    Lee, J. I., Choi, J., Lee, K., Jeong, B., & Kim, J. (2010). Development of carbon nanotubes contact-based linear displacement sensor with large sensing range. In MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest (pp. 627-630). [5442330] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2010.5442330