Development of flexible tactile sensor based on contact resistance of integrated carbon nanotubes

J. I. Lee, S. Pyo, M. O. Kim, T. Chung, H. K. Lee, S. C. Lim, J. Park, Jongbaeg Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

We have developed a novel three dimensional tactile sensor based on vertically aligned carbon nanotubes. The carbon nanotubes were directly synthesized on silicon microstructures and these CNTs-on-microstructures were integrated to flexible polydimethylsiloxane layers. Each tactile sensor has four sensing parts and the direction of force can be detected by monitoring the increase or decrease of electrical resistance in each sensing part. High gauge factor up to 272 and fast response less than 10 ms have been experimentally verified from the presented tactile sensor. The deviated contact resistance change from the initial value was less than 3% after repeated force input of 15 mN for 180,000 cycles.

Original languageEnglish
Title of host publicationIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Pages37-40
Number of pages4
DOIs
Publication statusPublished - 2013 Apr 2
EventIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan, Province of China
Duration: 2013 Jan 202013 Jan 24

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

OtherIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
CountryTaiwan, Province of China
CityTaipei
Period13/1/2013/1/24

Fingerprint

Carbon Nanotubes
Contact resistance
contact resistance
Carbon nanotubes
carbon nanotubes
Sensors
microstructure
Microstructure
Acoustic impedance
Silicon
Polydimethylsiloxane
electrical resistance
Gages
cycles
Monitoring
silicon

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Lee, J. I., Pyo, S., Kim, M. O., Chung, T., Lee, H. K., Lim, S. C., ... Kim, J. (2013). Development of flexible tactile sensor based on contact resistance of integrated carbon nanotubes. In IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 (pp. 37-40). [6474170] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2013.6474170
Lee, J. I. ; Pyo, S. ; Kim, M. O. ; Chung, T. ; Lee, H. K. ; Lim, S. C. ; Park, J. ; Kim, Jongbaeg. / Development of flexible tactile sensor based on contact resistance of integrated carbon nanotubes. IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013. 2013. pp. 37-40 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).
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abstract = "We have developed a novel three dimensional tactile sensor based on vertically aligned carbon nanotubes. The carbon nanotubes were directly synthesized on silicon microstructures and these CNTs-on-microstructures were integrated to flexible polydimethylsiloxane layers. Each tactile sensor has four sensing parts and the direction of force can be detected by monitoring the increase or decrease of electrical resistance in each sensing part. High gauge factor up to 272 and fast response less than 10 ms have been experimentally verified from the presented tactile sensor. The deviated contact resistance change from the initial value was less than 3{\%} after repeated force input of 15 mN for 180,000 cycles.",
author = "Lee, {J. I.} and S. Pyo and Kim, {M. O.} and T. Chung and Lee, {H. K.} and Lim, {S. C.} and J. Park and Jongbaeg Kim",
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Lee, JI, Pyo, S, Kim, MO, Chung, T, Lee, HK, Lim, SC, Park, J & Kim, J 2013, Development of flexible tactile sensor based on contact resistance of integrated carbon nanotubes. in IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013., 6474170, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 37-40, IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013, Taipei, Taiwan, Province of China, 13/1/20. https://doi.org/10.1109/MEMSYS.2013.6474170

Development of flexible tactile sensor based on contact resistance of integrated carbon nanotubes. / Lee, J. I.; Pyo, S.; Kim, M. O.; Chung, T.; Lee, H. K.; Lim, S. C.; Park, J.; Kim, Jongbaeg.

IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013. 2013. p. 37-40 6474170 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Lee JI, Pyo S, Kim MO, Chung T, Lee HK, Lim SC et al. Development of flexible tactile sensor based on contact resistance of integrated carbon nanotubes. In IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013. 2013. p. 37-40. 6474170. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2013.6474170